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  • Grease Lubrication Turbo Pump

  • Grease Lubrication Turbo Pump

  • Grease Lubrication Turbo Pump

  • Grease Lubrication Turbo Pump

  • Grease Lubrication Turbo Pump

  • Grease Lubrication Turbo Pump

Grease Lubrication Turbo Pump

EV series grease lubricating molecular pump

The impeller of EV type grease lubricating compound molecular pump adopts the vane tooth of variable cross section, and the bearing adopts grease lubricated ceramic precision bearing, which realizes the installation of pump body at any angle and cleans the oil-free high vacuum environment with higher reliability.


Industry Application


Industrial Leak Detection, PVD, CVD, Ion Implantation, Vacuum Electronic Component Manufacturing, Low-E Glass, Optical Coating, Solar Cell, Electron Beam Welding, Vacuum Furnace, Mass Spectrum Analysis, Laser, Film Deposition, Laboratory Research, Vacuum Filling Equipment, Vacuum Exhaust Platform, Space Environment Simulator, etc.


EV-300Z and EV-300ZF Technical Data



ModelEV-300ZEV-300ZF
Inlet Flange (mm)100CF100 ISO-K100CF100 ISO-K
Outlet Flange (mm)25 KF25 KF
Pumping Speed (L/S)300300
Compression RatioN2>108>108
H2>1X103>1X103
Ultimate Vacuum(Pa)<3X10-7<2X10-6<3X10-7<2X10-6
Rotation Speed(rpm)3000030000
BearingGrease-lubricated Ceramic BearingGrease-lubricated Ceramic Bearing
Run-up Time(min)<4<4
Backing Pump2 L/S2 L/S
Cooling MethodAir CoolingWaterCooling
ambient temperature5-36℃<38℃
MountingAny positionAny position
Weight(kg) (kg)≈11≈10.8


Grease Lubrication Turbo Pump

Product dimension, mounting connection dimension

Grease Lubrication Turbo Pump

EV-650Z(ZF)、EV-1300Z(ZF)、EV-2000Z(ZF) Technical Data

ModelEV-650ZEV-650ZFEV-1300ZEV-1300ZFEV-2000ZEV-2000ZF
Inlet Flange (mm)150 CF160 ISO-K200 CF200 ISO-K250 CF250 ISO-K
Outlet Flange (mm)40 KF40KF50KF
The flange of protective air(anticorrosive pump)16KF16KF16KF
Pumping Rate(L/S)65013002000
Compression RatioN2>109>109>109
H2>8X103>1X104>1X104
Ultimate Pressure(Pa)<8X10-8<5X10-7<8X10-8<5X10-7<8X10-8<5X10-7
Rated Speed(rpm)240002400024000
BearingGrease-lubricated Ceramic BearingGrease-lubricated Ceramic BearingGrease-lubricated Ceramic Bearing
Vibration≤0.1 μm≤0.1 μm≤0.1 μm
Starting Time(min)<5<5<5
Suggested rotary pump4-8 L/S8-15 L/S8-15 L/S
Cooling MethodWater(Air) CoolingWater(Air) CoolingWater(Air) Cooling
Temperature of Water Cooling(℃)≤20≤20≤20
The flow of water cooling(L/min)111
Installation ModAny positionAny positionAny position
Weight(kg)≈22≈27≈35


EV-650Z、EV-1300Z、EV-2000Z Mounting Dimension Table of Lipid Lubricating Molecular pump

Grease Lubrication Turbo Pump

ModelEV-650ZEV-1300ZEV-2000Z
Inlet Flange (mm)150 CF160 ISO-K200 CF200 ISO-K250 CF250 ISO-K
D1Φ202Φ180Φ253Φ240Φ305Φ290
D2Φ212Φ212Φ243Φ243Φ274Φ274
D3Φ236Φ236Φ266Φ266Φ296Φ296
L1112112150150123123
H1315315339339316.5312
H2300300334334299295
H3239239283283252248
H494.594.5103.5103.5102.5102.5



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