Grease Lubrication Turbo Pump
EV series grease lubricating molecular pump
The impeller of EV type grease lubricating compound molecular pump adopts the vane tooth of variable cross section, and the bearing adopts grease lubricated ceramic precision bearing, which realizes the installation of pump body at any angle and cleans the oil-free high vacuum environment with higher reliability.
Industry Application
Industrial Leak Detection, PVD, CVD, Ion Implantation, Vacuum Electronic Component Manufacturing, Low-E Glass, Optical Coating, Solar Cell, Electron Beam Welding, Vacuum Furnace, Mass Spectrum Analysis, Laser, Film Deposition, Laboratory Research, Vacuum Filling Equipment, Vacuum Exhaust Platform, Space Environment Simulator, etc.
EV-300Z and EV-300ZF Technical Data
| Model | EV-300Z | EV-300ZF | ||||
| Inlet Flange (mm) | 100CF | 100 ISO-K | 100CF | 100 ISO-K | ||
| Outlet Flange (mm) | 25 KF | 25 KF | ||||
| Pumping Speed (L/S) | 300 | 300 | ||||
| Compression Ratio | N2 | >108 | >108 | |||
| H2 | >1X103 | >1X103 | ||||
| Ultimate Vacuum(Pa) | <3X10-7 | <2X10-6 | <3X10-7 | <2X10-6 | ||
| Rotation Speed(rpm) | 30000 | 30000 | ||||
| Bearing | Grease-lubricated Ceramic Bearing | Grease-lubricated Ceramic Bearing | ||||
| Run-up Time(min) | <4 | <4 | ||||
| Backing Pump | 2 L/S | 2 L/S | ||||
| Cooling Method | Air Cooling | WaterCooling | ||||
| ambient temperature | 5-36℃ | <38℃ | ||||
| Mounting | Any position | Any position | ||||
| Weight(kg) (kg) | ≈11 | ≈10.8 | ||||
Product dimension, mounting connection dimension
EV-650Z(ZF)、EV-1300Z(ZF)、EV-2000Z(ZF) Technical Data
| Model | EV-650ZEV-650ZF | EV-1300ZEV-1300ZF | EV-2000ZEV-2000ZF | |||||
| Inlet Flange (mm) | 150 CF | 160 ISO-K | 200 CF | 200 ISO-K | 250 CF | 250 ISO-K | ||
| Outlet Flange (mm) | 40 KF | 40KF | 50KF | |||||
| The flange of protective air（anticorrosive pump） | 16KF | 16KF | 16KF | |||||
| Pumping Rate（L/S） | 650 | 1300 | 2000 | |||||
| Compression Ratio | N2 | >109 | >109 | >109 | ||||
| H2 | >8X103 | >1X104 | >1X104 | |||||
| Ultimate Pressure（Pa） | <8X10-8 | <5X10-7 | <8X10-8 | <5X10-7 | <8X10-8 | <5X10-7 | ||
| Rated Speed（rpm） | 24000 | 24000 | 24000 | |||||
| Bearing | Grease-lubricated Ceramic Bearing | Grease-lubricated Ceramic Bearing | Grease-lubricated Ceramic Bearing | |||||
| Vibration | ≤0.1 μm | ≤0.1 μm | ≤0.1 μm | |||||
| Starting Time（min） | <5 | <5 | <5 | |||||
| Suggested rotary pump | 4-8 L/S | 8-15 L/S | 8-15 L/S | |||||
| Cooling Method | Water(Air) Cooling | Water(Air) Cooling | Water(Air) Cooling | |||||
| Temperature of Water Cooling(℃) | ≤20 | ≤20 | ≤20 | |||||
| The flow of water cooling（L/min） | 1 | 1 | 1 | |||||
| Installation Mod | Any position | Any position | Any position | |||||
| Weight（kg） | ≈22 | ≈27 | ≈35 | |||||
EV-650Z、EV-1300Z、EV-2000Z Mounting Dimension Table of Lipid Lubricating Molecular pump
| Model | EV-650Z | EV-1300Z | EV-2000Z | |||
| Inlet Flange (mm) | 150 CF | 160 ISO-K | 200 CF | 200 ISO-K | 250 CF | 250 ISO-K |
| D1 | Φ202 | Φ180 | Φ253 | Φ240 | Φ305 | Φ290 |
| D2 | Φ212 | Φ212 | Φ243 | Φ243 | Φ274 | Φ274 |
| D3 | Φ236 | Φ236 | Φ266 | Φ266 | Φ296 | Φ296 |
| L1 | 112 | 112 | 150 | 150 | 123 | 123 |
| H1 | 315 | 315 | 339 | 339 | 316.5 | 312 |
| H2 | 300 | 300 | 334 | 334 | 299 | 295 |
| H3 | 239 | 239 | 283 | 283 | 252 | 248 |
| H4 | 94.5 | 94.5 | 103.5 | 103.5 | 102.5 | 102.5 |
