Mai Kula da Mass Flow Controller (MFC)
Thermalgasmassfƙanananmeter(MFM) isakindogaskiyatemeasuremshigagasflow,the measuredvalkasarinotcontrolledbyfluctuationsintemperatureorpressure, ba bukatathecompensationoftemperratureandpressure.
| Samfura | Saukewa: SQC-100 |
| Matsakaicin Tafiya (N2) | 0~5,10,20,30,50,100,200,500SCCM |
| 0~1, 2, 3, 5, 10, 15, 20, 30SLM | |
| Daidaito | ±1%FS(≤15SLM):2%FS(>15SLM) |
| Nau'in Driver Valve | An rufe na al'ada |
| Linearity | ±1%FS(≤15SLM):2%FS(>15SLM) |
| Maimaituwa | ± 0.2 FS |
| Lokacin Amsa | ≤1 dakika |
| Siginar shigarwa/fitarwa | 0 ~5V |
| Haɗin Wutar Lantarki | DB15 fil (allura) |
| Operation Tem. | 5 ℃ 45 |
| Daban-daban Pre. | 0.05 ~ 0.5MPa (MFC); 0.03 ~ 3.0MPa (MFM) |
| Yawan Leak | 1 × 10-8SCCS (Shi) |
| Max.Matsin lamba | 3MPa |
| Matsakaici Material | 316L SS da abin rufewa |
| Abun rufewa | Viton, Silicone roba, NBR, Teflon, Karfe hatimi. |
| Girman haɗin gwiwa | VCR 1/4 "; Swagelok 1/8" , 1/4 "; φ3, φ6mm |
| Tushen wutan lantarki | + 15V, 50mA; -15V,200mA |
| Samfura | SQC-200 |
| Matsakaicin Tafiya (N2) | MFC: 0 ~ 20, 30, 50, 100, 150, 200SLM |
| MFM: 0-20, 30, 50, 100, 150, 200, 250, 300SLM | |
| Daidaito | ± 2 FS |
| Nau'in Driver Valve | An rufe na al'ada |
| Linearity | ± 2 FS |
| Maimaituwa | ± 0.2 FS |
| Lokacin Amsa | ≤5 dakika |
| Siginar shigarwa/fitarwa | 1 5V; 4 ~ 20mA |
| Haɗin Wutar Lantarki | DB15 fil (allura) |
| Operation Tem. | 5 ℃ 45 |
| Daban-daban Pre. | 0.1 ~ 0.3MPa (MFC); 0.05 ~ 3.0MPa (MFM) |
| Yawan Leak | 1 × 10-8SCCS (Shi) |
| Max.Matsin lamba | 3MPa |
| Matsakaici Material | 316L SS da abin rufewa |
| Abun rufewa | Viton, roba silicone, NBR, ERP, Teflon |
| Girman haɗin gwiwa | Swagelok 3/8 ", 1/2"; φ8, φ10, φ12mm |
| Tushen wutan lantarki | 24V, 0.5A |
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