EV series turbo molecular pump

ʻO ka wehewehe pōkole:

EV-3600 Hoʻohana ka impeller o turbomolecular pump i nā niho o ka ʻāpana cross-section i hana mua ʻia ma Kina, ka mea e hoʻonui ai i ka ikaika o ka pahi, hoʻemi i ke kaumaha o ka rotor, pōkole ka manawa hoʻomaka, hoʻemi i ka nalowale mechanical a hoʻonui i ke ola lawelawe. .

E hoʻouna i ka leka uila iā mākou

Huahana Huahana

ʻO ka nui o ka profile a me ka hoʻopili ʻana o nā paila turbo-molecular

Ka Velocity Curve o Turbo molecular pump
ka paila ʻana i ka nitrogen a me ka hydrogen

Ka Velocity Curve o Turbo molecular
pamu i ka lewa

EV-3600 ʻIkepili ʻenehana

ʻAla komo (mm)		400 ISO - K
Puke puka puka (mm)		100 ISO - K
Laki Paʻi (L/S)		3600
Pākuʻi hoʻoemi	N²	>10⁸
	H²	>5X10²
Paʻi Loa（Pa）		<2X10^-6
Ka wikiwiki i helu ʻia（rpm）		13500
Haʻalulu		≤0.15 μm
Wā hoʻomaka（min）		<11
Hoʻomaha manawa(min）)		<20
Manaʻo ʻia ka pauma rotary		30-70 L/S
Hana Hooluu		Hoʻoluʻu wai
Ka Mahana o ka wai anuanu (℃)		≤25
ʻO ke kahe o ka hoʻoluʻu wai（L/min）		2
Pum Kino Baking Mahana		<120 ℃
ʻAno hoʻokomo		Kū pololei ±5°
Kaumaha（kg）		≈100