Mea hoʻoponopono hoʻoheheʻe nui CS200
Nā hiʻohiʻona
1. Pono Kiʻekiʻe a me ka pane wikiwiki
Ua hoʻomaikaʻi ʻia ka pololei o ka CS200 MFC i ± 1.0% o SP, a ʻo nā hiʻohiʻona kiʻekiʻe loa i hōʻemi ʻia ka manawa pane ma lalo o 0.8 sec.
2. Haʻahaʻa Zero Drift a me ka Mahana Coefficient
Hiki i ka CS200 MFC ke hoʻomau i ka paʻa a me ka pale ʻana i nā loli wela.Me ka loaʻa ʻole o kahi amplifier auto-zero, ʻoi aku ka liʻiliʻi o ka zero drift i manaʻo ʻia ma mua o 0.6%FS/makahiki, a ʻo ka coefficient wela ma lalo o 0.02%FS/℃(zero), 0.05%FS/ ℃ (span).
3. Hoʻohālike i hoʻopaʻa ʻia metala a me nā hiʻohiʻona maʻemaʻe kiʻekiʻe
Kūkulu ʻia ke ala kahe wai o-ka-laina CS200 MFC mai ke kila kila i hoʻopaʻa ʻia ma luna.Hoʻākoakoa ʻia nā MFC CS200 a pau i loko o nā lumi hoʻomaʻemaʻe papa ultraclean Class 100 o Sevenstar e like me nā kūlana SEMI a me ISO 9001.
4. Nā Interface kūpono
Ua kūpono ka CS200 MFC me kēia mau mea hoʻopili, hiki ke koho ʻia e ka mea kūʻai: ± 8V-± 16V mana mana lua a me + 14V-+28V ka mana hoʻokahi;hoʻokomo a me ka hoʻopuka hōʻailona kikohoʻe a analog paha;SEMI maʻamau mechanical dimension;a me RS-485 a i ʻole DeviceNet module kamaʻilio.
5. Nā Hana like ʻole
Loaʻa nā polokalamu mea kūʻai ikaika me kēlā me kēia kŘkohu, aʻo nā hana hou e like me multi-gas，multi-range，auto-zero, alarms, soft start, a me ka hoʻopaneʻe e loaʻa i nā koho mea kūʻai aku.
Hōʻike
| CS200 | |||||||
| ʻAno | CS200A | CS200C | CS200D | ||||
| Ka laulā piha (N2) | ( 0~5,10,20,30,50,100,200,300,500)SCCM | ( 0～2,3,5,10,20,30,50,100,200,300,500)SCCM | |||||
| ( 0～1,2,3,5,10,20,30,50)SLM | ( 0～1,2,3,5,10,20,30)SLM | ||||||
| Ka pololei | ±1.0% SP (≥35% FS) ±0.35% FS?(＜35% FS) | ||||||
| Linearity | ±0.5% FS | ||||||
| Hiki hou | ±0.2% FS | ||||||
| Manawa pane | ≤1sec | ≤0.8 kekona (SEMI E17-0600) | |||||
| Kūlana hoʻomaha valve | Paʻa maʻamau a i ʻole | ʻAʻole Valve | Paʻa maʻamau a i ʻole | ʻAʻole Valve | Paʻa maʻamau a i ʻole | ʻAʻole Valve | |
| Wehe maʻamau（100 sccm≤FS≤5 slm） | Wehe maʻamau（100 sccm≤FS≤5 slm） | Wehe maʻamau（100 sccm≤FS≤5 slm） | |||||
| Paʻi ʻokoʻa | 0.05～0.35MPa （Ke kahe≤10slm） | ＜0.02MPa | (0.05～0.35) MPa（≤10slm） | ＜0.02MPa | (0.05～0.35) MPa（≤10slm） | ＜0.02MPa | |
| 0.1～0.35MPa（10slm＜Ke kahe≤30slm） | (0.1～0.35) MPa（＞10slm） | (0.1～0.35) MPa（＞10slm） | |||||
| 0.2～0.45MPa （Ke kahe＞30slm） | |||||||
| ʻO ke kaomi hana kiʻekiʻe loa | 0.45MPa | |||||
| Mahana | Kole:≤±0.05% FS/℃; | Kole:≤±0.02% FS/℃;Manawa:≤±0.05% FS/℃ | ||||
| Coefficient | Ka lōʻihi: ≤±0.1% FS/℃（Kahe≤30slm） | |||||
| Manawa: ≤±0.2% FS/℃（Ke kahe>30slm） | ||||||
| Paʻi Hōʻike | 3MPa (435 pisg) | |||||
| Holoi ʻole | ＜0.6%FS i kēlā me kēia makahiki me ka ʻole autozero | |||||
| Leak pono | 1×10-9 atm·cc / sec He | 1×10-10atm·cc / sec He | ||||
| Na mea pulu | Viton; | Metala?(Stainless Steel V/V, 5Ra) | Metala | |||
| Kemika Ili | —— | Lakiō Cr/Fe ＞2.0;CrO mānoanoa ＞20 Angstroms | ||||
| Hoʻopau ʻili | 25Ra | 10Ra | 25Ra | |||
| Hana Hana | （5～45） ℃ | （0～50） ℃ | ||||
| Hoailona hookomo | Kikohoʻe: RS485 a i ʻole ProfiBus | N/A | Kikohoʻe: RS485 a i ʻole ProfiBus a i ʻole DeviceNetTM | N/A | Kikohoʻe: RS485 a i ʻole ProfiBus a i ʻole DeviceNetTM | N/A |
| a i ʻole DeviceNetTM | Analog:(0～5)VDC a i ole (4～20)mA a i ole (0～20)mA | Analog:(0～5)VDC a i ole (4～20)mA?ai ole (0～20)mA | |||||
| Analog:(0～5)VDC a i ole (4～20)mA a i ole(0～20)mA | |||||||
| Hōʻailona Huakaʻi | Kikohoʻe: RS485 a i ʻole DeviceNetTM a i ʻole ProfiBus Analog:(0～5)VDC a i ʻole (4～20)mA a i ʻole (0～20)mA | ||||||
| Lako ikehu | ±8 ~ ±16 VDC a i ʻole +14 ~ +28 VDC(400mA) | ||||||
| Mea hoʻohui uila | 9 pin male sub-D ，15 pin male sub-D ，DeviceNetTM，ProfiBus ， Analog | ||||||
| Nā lako | VCR1/4” M； VCO1/4” M； | VCR1/4” M; | |||||
| Hoʻopili HoʻopiʻiΦ10; Pākuʻi HoʻopiʻiΦ6； | ʻO ka hoʻopili ʻanaΦ6, | ||||||
| Hoʻopili Paʻa 3/8”;ʻO ka hoʻopili ʻana i ka 1/4”; | ʻO ka hoʻopili ʻanaΦ3, | ||||||
| Hoʻopili Hoʻopili1/8”;ʻO ka hoʻopili ʻanaΦ3； | 1/4” ， | ||||||
| Ф6(loko)×1hose;ф5(loko)×1.5hose;ф4(loko)×1hose; | W-sila, | ||||||
| A-saela ; | C-sila | ||||||
| Kaumaha | 1 kg | 0.8kg | 1.2kg | 1 kg | 1.2kg | 1 kg | |
