Mea hoʻomalu holo kino kinoea wela (MFC)
ʻO karmnā limumhokifhaahaameter(MFM)isakindofaccuratemeasuremponofgasflow,the measuredvaluesarenotcontrolledbyfluctuationsintemperatureorpresspono, ʻaʻole ponothecompensationoftemperatureandpressure.
| Hoʻohālike | SQC-100 |
| Nā pae o ke kahe (N2) | 0～5,10,20,30,50,100,200,500SCCM |
| 0～1, 2, 3, 5, 10, 15, 20, 30SLM | |
| Ka pololei | ±1％FS(≤15SLM)；±2％FS(＞15SLM) |
| ʻAno Hoʻokele Valve | Paʻa maʻamau |
| Linearity | ±1％FS(≤15SLM)；±2％FS(＞15SLM) |
| Hiki hou | ±0.2％FS |
| Manawa pane | ≤1sec |
| Hōʻailona hoʻokomo/puka | 0～5V |
| Hui Uila | DB15 pine (needle) |
| Hana Tem. | 5~45 ℃ |
| ʻokoʻa Pre. | 0.05～0.5MPa （MFC）； 0.03～3.0MPa （MFM） |
| Leak Laki | 1×10-8SCCS （He） |
| Max.Paʻi | 3MPa |
| Mea Kaulike | 316L SS a me ka mea sila |
| Mea Sila | Viton, Silicone rubber, NBR, Teflon, Sila metala. |
| Nui Hui | VCR 1/4”；Swagelok 1/8” 、1/4”；φ3, φ6mm |
| Lako ikehu | +15V,50mA;-15V,200mA |
| Hoʻohālike | SQC-200 |
| Nā pae o ke kahe (N2) | MFC:0～20,30,50,100,150,200SLM |
| MFM:0~20 ,30,50,100,150,200,250,300SLM | |
| Ka pololei | ±2％FS |
| ʻAno Hoʻokele Valve | Paʻa maʻamau |
| Linearity | ±2％FS |
| Hiki hou | ±0.2％FS |
| Manawa pane | ≤5sec |
| Hōʻailona hoʻokomo/puka | 1～5V;4～20mA |
| Hui Uila | DB15 pine (needle) |
| Hana Tem. | 5~45 ℃ |
| ʻokoʻa Pre. | 0.1～0.3MPa（MFC）； 0.05～3.0MPa（MFM） |
| Leak Laki | 1×10-8SCCS （He） |
| Max.Paʻi | 3MPa |
| Mea Kaulike | 316L SS a me ka mea sila |
| Mea Sila | Viton, Silicone rubber, NBR, ERP, Teflon |
| Nui Hui | Swagelok 3/8” 、1/2”； φ8、φ10、φ12mm |
| Lako ikehu | 24V,0.5A |
E kākau i kāu leka ma aneʻi a hoʻouna mai iā mākou
