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  • Oil Diffusion Pump

  • Oil Diffusion Pump

  • Oil Diffusion Pump

Oil Diffusion Pump

KT High vacuum oil diffusion vacuum pump are the equipment mainly used for getting the high vacuum condition (10^-2~10^-5 Pa);  the pump, valves, water cooling baffle,  pipe and mechanical vacuum pump are the composition of a vacuum unit,10^-2 ~10^-4 Vacuum degree can be obtained. If liquid nitrogen or other cooling device can be used, it can get ultra-high vacuum (10^- 6 pa) with baking.

The pumping capacity is big, the pumping speed can be changed range from 480L/s to 13000L/s, it adds observation windows, oil inlet and outlet and pump oil temperature measuring device, KT adopts stretching process, reduces weld crack and out gassing and increases strength. There are two kinds of heater you can choose: heating wire or heating plate.


Its widely used for high technology fields of vacuum coating ( such as Multi-arc ion coating machine, Magnetron sputtering coating machine, Resistance evaporation coating machine, Electron beam evaporation optical coating machine, Rolling vacuum coating, Continuous vacuum coating machine production line /In-line coating production line, etc), vacuum furnace ( such as, vacuum soldering/brazing furnace, vacuum annealing furnace, vacuum tempering furnace, vacuum sintering furnace, vacuum carburizing furnace, etc), electron, chemical industry, metallurgy, aviation, aerospace, material, creature medicine, atomic energy and universe probe, etc.

KT series high vacuum oil diffusion pump main technical performance parameter table

Ultimate Vacuum(Pa)5×10-5
Pumping Speed(1.3×10-3~6.6×10-5Pa Internal-to-Air)(L/S)8001750280035007500900016000290004600050000
Heating Power (KW)0.9~1.01.2~1.822~33~47.56~711~1318~1924
Oil Mass(L)0.4~0.60.5~
Water Consumption(L/h)200300350400600700800120015002600
Maximum critical pressure(Pa)40
Recommended Backing Pumping Speed(L/S)81520306070120240350350
Diameter of Inlet(mm)Φ160Φ200Φ250Φ300Φ400Φ500Φ600Φ800Φ1000Φ1200
Diameter of outlet(mm)Φ50Φ65Φ65Φ80Φ100Φ100Φ150Φ200Φ200Φ300

Oil Diffusion Pump

KT series high vacuum oil diffusion pump connection size table