Ngaaariki Mana Rere Papatipu (MFC)
Ko termpūkohumkaihefitimeter(MFM)isakindofaccuratemeasurementofgasflow,the measuredvaluesarenotcontrolledbyfluctuationsintemperatureorpressure, kaua e hiahiatiathecompensationoftemperatureandpressure.
| Tauira | SQC-100 |
| Awhe Rere (N2) | 0～5,10,20,30,50,100,200,500SCCM |
| 0～1, 2, 3, 5, 10, 15, 20, 30SLM | |
| Tika | ±1％FS(≤15SLM)；±2％FS(＞15SLM) |
| Momo Puku takirere | Kati noa |
| Rarangirangi | ±1％FS(≤15SLM)；±2％FS(＞15SLM) |
| Te tukurua | ±0.2％FS |
| Wā Whakautu | ≤1hekona |
| Tohu Whakauru/Putanga | 0～5V |
| Hononga Hiko | titi DB15 (ngira) |
| Mahi Tem. | 5～45℃ |
| Tuhinga o mua. | 0.05～0.5MPa （MFC）； 0.03～3.0MPa （MFM） |
| Reanga turuturu | 1×10-8SCCS （He） |
| Max.Te pehanga | 3MPa |
| Rauemi Waenga | 316L SS me nga taonga hiri |
| Rauemi hiri | Viton, rapa Silicone, NBR, Teflon, hiri whakarewa. |
| Rahi Hononga | VCR 1/4”；Swagelok 1/8” 、1/4”；φ3, φ6mm |
| Tuku Hiko | +15V,50mA;-15V,200mA |
| Tauira | SQC-200 |
| Awhe Rere (N2) | MFC:0～20,30,50,100,150,200SLM |
| MFM:0～20 ,30 ,50,100,150,200,250,300SLM | |
| Tika | ±2％FS |
| Momo Puku takirere | Kati noa |
| Rarangirangi | ±2％FS |
| Te tukurua | ±0.2％FS |
| Wā Whakautu | ≤5 hēkona |
| Tohu Whakauru/Putanga | 1～5V; 4～20mA |
| Hononga Hiko | titi DB15 (ngira) |
| Mahi Tem. | 5～45℃ |
| Tuhinga o mua. | 0.1～0.3MPa（MFC）； 0.05～3.0MPa（MFM） |
| Reanga turuturu | 1×10-8SCCS （He） |
| Max.Te pehanga | 3MPa |
| Rauemi Waenga | 316L SS me nga taonga hiri |
| Rauemi hiri | Viton, rapa Silicone, NBR, ERP, Teflon |
| Rahi Hononga | Swagelok 3/8” 、1/2”； φ8,φ10,φ12mm |
| Tuku Hiko | 24V,0.5A |
Tuhia to korero ki konei ka tukuna mai ki a matou
