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Ultra-high Vacuum Gate Valves

Ultra-high Vacuum Gate Valves

Jun. 29, 2020

Ultra-high Vacuum Gate Valves

This series of valves is divided into manual, pneumatic and electric drive modes.

Featured with smooth operation, small size, reliable application, good sealing performance and long service life. It can be widely used in high vacuum equipment.

The valve is powered by a manual rotating handle, a compressed gas pushing cylinder and a motor driving torque. The driving rod pushes (pulls) the moving link mechanism, and the driving body moves along the axial direction, and the driving body passes through the swing rod or the rigid ball and the valve plate.

Connect to complete the valve plate opening and closing action. The medium of the valve is air and non- corrosive gas.



Technical Parameters


Application scope

1x10^(-5)Pa~1.2x10^(5)Pa(Viton o-ring sealed)

1x10^(-6)Pa~1.2x10^(5)Pa(Bellow seal)

Differential pressure on the gate



3x10^(3)Pa any directions

Body and seat leak




Cycles until first service


100,000 times

Bake-out temperature

open250; close150


Installation position


Any directions

Compressed air (only supply to pneumatic valves)



DN63~200: 0.4-0.7MPa;DN250~400: 0.5~0.7MPa



Power Supply

Pneumatic valves: AC 220V 50HZ, 6W or DC 24V, 3W( can be customized) DN63~250 for AC 220V 50HZ, 25WOr AC 380V 50HZ, 25W

DN320~400 is AC 220V 50HZ, 40W Or AC 380V 50HZ, 40W

Speed of opening or closing:

Pneumatic drive:DN63~DN2506s; DN320~DN40010s

Electric drive:DN63~DN25050s; DN320~DN40060s


Valve position indication:

Manual drive: with start & stop position indicator switch (mechanical) Pneumatic drive: with start & stop position indicator switch (magnetic switch)

Electric drive: with start & stop position indicator switch (micro switch)

Ultra-high Vacuum Gate Valves

Precautions in use:

1. The valve should first check whether the valve is intact and the accessories are complete.

2. The valve should be kept clean and stored in a dry room and protected from strong vibrations.

3. When the valve is not used for long-term storage, the valve should be in the micro-open state, and should be checked regularly to prevent moisture, rust and rubber parts aging.

4. Before installation, the surface of the valve and vacuum should be cleaned according to vacuum hygiene requirements.

5. The user's flange connected to the valve must have no protruding welds in the joint hole.

6. The air supply pressure to the pneumatic valve should be guaranteed in the range of 0.4 to 0.7 MPa.

7. The signal switch of the pneumatic valve is a passive switch signal, and the maximum load of the switch is 0.1A 250VAC.

8. The newly used pneumatic valve may encounter a higher pressure of the air source required for shutting down. This is a normal phenomenon, and the pressure of the air source required to close after the number of times of operation is decreased.