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  • Oil Lubrication Turbo Pump

  • Oil Lubrication Turbo Pump

  • Oil Lubrication Turbo Pump

  • Oil Lubrication Turbo Pump

  • Oil Lubrication Turbo Pump

Oil Lubrication Turbo Pump

EV-series compound molecular pumps are composed of turbo molecular pumps and disk traction pumps. They have the characteristics of high pumping speed, high compression ratio, high pumping speed and high compression ratio at high pressure, and expand the application scope of molecular pumps.

The compound molecular pump has no selectivity and memory effect on the pumped gas. Because of its high compression ratio to the gas with large molecular weight, the pump can obtain clean high and ultra high vacuum without cold trap and oil baffle. 


Industry Application


It is widely used in various fields of electronics, metallurgy, chemical industry, scientific research and vacuum technology.



EV-series Technical Data

ModelEV-600EV-600FEV-1200EV-1200FEV-1600EV-1600F
Inlet Flange (mm)150 CF160 ISO-K200 CF200 ISO-K250 CF250 ISO-K
Outlet Flange(mm)40 KF40 KF50 KF
Pumping Speed(L/S)60012001600
Compression RatioN2>109>109>109
H2>8X103>1X104>1X104
Ultimate Vacuum(Pa)<8X10-8<5X10-7<8X10-8<5X10-7<8X10-8<5X10-7
Rotation Speed(rpm)240002400024000
Vibration≤0.1 μm≤0.1 μm≤0.15 μm
Run-up Time(min)<4.5<5<6
Backing Pump4-8 L/S8-15 L/S15 L/S
Cooling MethodWater(air) coolingWater(air) coolingWater(air) cooling
Cooling Water Temperature  (℃)≤20≤20≤20
Ambient Temperature(℃)≤35≤35≤35
Cooling Water Flow quantity1-2 L/min1-2 L/min1-2 L/min
Bake-out Temperature(℃)<120<120<120
Heater Power(w)<250<300<300
Heater Input Voltage(v)AC220AC220AC220
MountingVertical ±5°Vertical  ±5°Vertical ±5°
Weight(kg)≈25≈29≈31

Oil Lubrication Turbo Pump


EV Series Installation Dimension Table of Composite Molecular Pump

Oil Lubrication Turbo Pump

ModelEV-600EV-1200EV-1600
Inlet Flange (mm)150 CF160 ISO-K200 CF200 ISO-K250 CF250 ISO-K
D1Φ202Φ180Φ253Φ240Φ305Φ290
D2Φ212Φ212Φ237Φ237Φ274Φ274
D3Φ236Φ236Φ266Φ266Φ296Φ296
D4¨145.7¨145.7¨167.6¨167.6¨183.9¨183.9
H1375375405405393393
H2235235265265250250
H3238238265265250250
H4108108113113110110
H54419191616
L1130130145145160160
L2137137152152176176
Pump leg screw hole4-M84-M84-M84-M84-M84-M8
Outlet Flange(mm)KF40KF40KF40KF40KF50KF50


Oil Lubrication Turbo Pump

ModelEV-600FEV-1200FEV-1600F
Inlet Flange (mm)150 CF160 ISO-K200 CF200 ISO-K250 CF250 ISO-K
D1Φ202Φ180Φ253Φ240Φ305Φ290
D2Φ236Φ236Φ266Φ266Φ274Φ274
D3¨145.7¨145.7¨167.6¨167.6¨183.8¨183.8
H1455455472472465465
H2217.5217.5210210214.5214.5
H3151151151151153153
L1130130145145161161
L2137137152152166166
Pump leg screw hole4-M84-M84-M84-M84-M84-M8



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