Oil Lubrication Turbo Pump
EV-series compound molecular pumps are composed of turbo molecular pumps and disk traction pumps. They have the characteristics of high pumping speed, high compression ratio, high pumping speed and high compression ratio at high pressure, and expand the application scope of molecular pumps.
The compound molecular pump has no selectivity and memory effect on the pumped gas. Because of its high compression ratio to the gas with large molecular weight, the pump can obtain clean high and ultra high vacuum without cold trap and oil baffle.
Industry Application
It is widely used in various fields of electronics, metallurgy, chemical industry, scientific research and vacuum technology.
EV-series Technical Data
| Model | EV-600EV-600F | EV-1200EV-1200F | EV-1600EV-1600F | ||||
| Inlet Flange (mm) | 150 CF | 160 ISO-K | 200 CF | 200 ISO-K | 250 CF | 250 ISO-K | |
| Outlet Flange(mm) | 40 KF | 40 KF | 50 KF | ||||
| Pumping Speed(L/S) | 600 | 1200 | 1600 | ||||
| Compression Ratio | N2 | >109 | >109 | >109 | |||
| H2 | >8X103 | >1X104 | >1X104 | ||||
| Ultimate Vacuum(Pa) | <8X10-8 | <5X10-7 | <8X10-8 | <5X10-7 | <8X10-8 | <5X10-7 | |
| Rotation Speed(rpm) | 24000 | 24000 | 24000 | ||||
| Vibration | ≤0.1 μm | ≤0.1 μm | ≤0.15 μm | ||||
| Run-up Time(min) | <4.5 | <5 | <6 | ||||
| Backing Pump | 4-8 L/S | 8-15 L/S | 15 L/S | ||||
| Cooling Method | Water(air) cooling | Water(air) cooling | Water(air) cooling | ||||
| Cooling Water Temperature (℃) | ≤20 | ≤20 | ≤20 | ||||
| Ambient Temperature（℃） | ≤35 | ≤35 | ≤35 | ||||
| Cooling Water Flow quantity | 1-2 L/min | 1-2 L/min | 1-2 L/min | ||||
| Bake-out Temperature（℃） | <120 | <120 | <120 | ||||
| Heater Power（w） | <250 | <300 | <300 | ||||
| Heater Input Voltage（v） | AC220 | AC220 | AC220 | ||||
| Mounting | Vertical ±5° | Vertical ±5° | Vertical ±5° | ||||
| Weight(kg) | ≈25 | ≈29 | ≈31 | ||||
EV Series Installation Dimension Table of Composite Molecular Pump
| Model | EV-600 | EV-1200 | EV-1600 | ||||
| Inlet Flange (mm) | 150 CF | 160 ISO-K | 200 CF | 200 ISO-K | 250 CF | 250 ISO-K | |
| D1 | Φ202 | Φ180 | Φ253 | Φ240 | Φ305 | Φ290 | |
| D2 | Φ212 | Φ212 | Φ237 | Φ237 | Φ274 | Φ274 | |
| D3 | Φ236 | Φ236 | Φ266 | Φ266 | Φ296 | Φ296 | |
| D4 | ¨145.7 | ¨145.7 | ¨167.6 | ¨167.6 | ¨183.9 | ¨183.9 | |
| H1 | 375 | 375 | 405 | 405 | 393 | 393 | |
| H2 | 235 | 235 | 265 | 265 | 250 | 250 | |
| H3 | 238 | 238 | 265 | 265 | 250 | 250 | |
| H4 | 108 | 108 | 113 | 113 | 110 | 110 | |
| H5 | 4 | 4 | 19 | 19 | 16 | 16 | |
| L1 | 130 | 130 | 145 | 145 | 160 | 160 | |
| L2 | 137 | 137 | 152 | 152 | 176 | 176 | |
| Pump leg screw hole | 4-M8 | 4-M8 | 4-M8 | 4-M8 | 4-M8 | 4-M8 | |
| Outlet Flange(mm) | KF40 | KF40 | KF40 | KF40 | KF50 | KF50 | |
| Model | EV-600F | EV-1200F | EV-1600F | |||
| Inlet Flange (mm) | 150 CF | 160 ISO-K | 200 CF | 200 ISO-K | 250 CF | 250 ISO-K |
| D1 | Φ202 | Φ180 | Φ253 | Φ240 | Φ305 | Φ290 |
| D2 | Φ236 | Φ236 | Φ266 | Φ266 | Φ274 | Φ274 |
| D3 | ¨145.7 | ¨145.7 | ¨167.6 | ¨167.6 | ¨183.8 | ¨183.8 |
| H1 | 455 | 455 | 472 | 472 | 465 | 465 |
| H2 | 217.5 | 217.5 | 210 | 210 | 214.5 | 214.5 |
| H3 | 151 | 151 | 151 | 151 | 153 | 153 |
| L1 | 130 | 130 | 145 | 145 | 161 | 161 |
| L2 | 137 | 137 | 152 | 152 | 166 | 166 |
| Pump leg screw hole | 4-M8 | 4-M8 | 4-M8 | 4-M8 | 4-M8 | 4-M8 |
