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  • UHV Pneumatic Gate Valve

  • UHV Pneumatic Gate Valve

Ultra-high Vacuum Pneumatic Gate Valve

EVCCQ Series Ultra-high Vacuum Pneumatic Gate Valve

EVCCQ Series ultra-high vacuum plug-in valve is driven by cylinder rod up and down to open or close the valve plate. 

Valves are suitable for cutting off or connecting air flow in ultra-high vacuum system. It has the advantages of reasonable structure design, stable operation, small size, reliable use, good sealing performance and long service life.  

The suitable working medium is clean air and non-corrosive gas.


Technical Parameters of EVCCQ Series Ultra-high Vacuum Pneumatic Gate Valve

ModelEVCCQ-63B(CF)EVCCQ-80B(CF)EVCCQ-100B(CF)EVCCQ-160B(CF)EVCCQ-200B(CF)EVCCQ-250B(CF)
Pressure rangePa1.3x10-7~1.2x105
Inside nominal diametermm6380100150200250
Leak ratePa·L/s1.3x10-7
Different pressure in  opening directionPa3000 (arbitrary)
Connection flangeCF、ISO-K、GB-LP、ISO-F
Service life until first maintenancetimes10000
Heating temperature(Valve body)Closed≤120,  opend≤150
Supply voltageV220±10 %( Other specifications can be customized )
Opening / closing times≤ 6
Compressed airMPa0.4~0.70.5~0.7
Position indicator of the valveMagnetic switch
Installation orientationany
Ambient temperature5~40



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