Ultra-high Vacuum Pneumatic Gate Valve
EVCCQ Series Ultra-high Vacuum Pneumatic Gate Valve
EVCCQ Series ultra-high vacuum plug-in valve is driven by cylinder rod up and down to open or close the valve plate.
Valves are suitable for cutting off or connecting air flow in ultra-high vacuum system. It has the advantages of reasonable structure design, stable operation, small size, reliable use, good sealing performance and long service life.
The suitable working medium is clean air and non-corrosive gas.
Technical Parameters of EVCCQ Series Ultra-high Vacuum Pneumatic Gate Valve
Model | EVCCQ-63B(CF) | EVCCQ-80B(CF) | EVCCQ-100B(CF) | EVCCQ-160B(CF) | EVCCQ-200B(CF) | EVCCQ-250B(CF) | ||
Pressure range | Pa | 1.3x10-7~1.2x105 | ||||||
Inside nominal diameter | mm | 63 | 80 | 100 | 150 | 200 | 250 | |
Leak rate | Pa·L/s | 1.3x10-7 | ||||||
Different pressure in opening direction | Pa | 3000 (arbitrary) | ||||||
Connection flange | — | CF、ISO-K、GB-LP、ISO-F | ||||||
Service life until first maintenance | times | 10000 | ||||||
Heating temperature(Valve body) | ℃ | Closed≤120, opend≤150 | ||||||
Supply voltage | V | 220±10 %( Other specifications can be customized ) | ||||||
Opening / closing time | s | ≤ 6 | ||||||
Compressed air | MPa | 0.4~0.7 | 0.5~0.7 | |||||
Position indicator of the valve | — | Magnetic switch | ||||||
Installation orientation | — | any | ||||||
Ambient temperature | ℃ | 5~40 |