Pule o le tafega o le Mass Flow Meter CS200
Vaega
1. Sa'o Maualuga ma Tali vave
O le saʻo o le CS200 MFC ua faʻaleleia i le ± 1.0% o le SP, ma o faʻataʻitaʻiga sili ona maualuga o loʻo i ai le faʻaitiitia o le taimi tali e itiiti ifo i le 0.8 sec.
2. Maualalo Zero Drift ma le Temperature Coefficient
O le mea fou fou o tekonolosi fa'atekonolosi e mafai ai e le CS200 MFC ona fa'amautu le mautu ma tatalia suiga o le vevela.A aunoa ma se fa'aola le auto-zero, o le fa'ata'ita'iga e leai se mea e fa'amoemoeina e la'ititi ifo i le 0.6%FS/tausaga, ma o le aofa'i o le vevela e itiiti ifo i le 0.02% FS/℃(zero), 0.05%FS/ ℃ (span).
3. Fa'ata'ita'iga Fa'amaufa'ailoga Fa'amauma'a ma Fa'ailoga Mamalu Maualuga
O le ala tafe susu o-le-laina CS200 MFC ua fausia mai luga-passivated u'amea stainless.O CS200 MFC uma o lo'o fa'apotopotoina i potu mama ole Vasega 100-vasega a Sevenstar e tusa ai ma tulaga uma e lua SEMI ma ISO 9001.
4. Fegalegaleaiga Fegalegaleai
O le CS200 MFC e fetaui lelei ma fesoʻotaʻiga nei, e mafai ona filifilia e le tagata faʻatau: ± 8V-± 16V lua faʻaiʻuga eletise ma le + 14V-+28V tasi-muʻu eletise sapalai;fa'ailoga fa'akomepiuta po'o fa'ailo fa'atusa fa'ailoga ma mea e fa'atino;SEMI tulaga fa'ainisinia fua;ma le RS-485 po'o le DeviceNet feso'ota'iga module.
5. Galuega Eseese
O lo'o iai fa'ata'ita'iga fa'ata'ita'iga ta'itasi, a'o avanoa fa'aopoopo e pei o le tele-gas，multi-range，auto-zero, fa'ailo, amata vaivai, ma le tuai o lo'o avanoa e avea ma filifiliga a tagata fa'atau.
Fa'amatalaga
| CS200 | |||||||
| Ituaiga | CS200A | CS200C | CS200D | ||||
| Fa'asologa atoa (N2) | ( 0~5,10,20,30,50,100,200,300,500)SCCM | ( 0～2,3,5,10,20,30,50,100,200,300,500)SCCM | |||||
| ( 0～1,2,3,5,10,20,30,50)SLM | ( 0～1,2,3,5,10,20,30)SLM | ||||||
| Sa'o | ±1.0% SP (≥35% FS) ±0.35% FS?(＜35% FS) | ||||||
| Linearity | ±0.5% FS | ||||||
| Toe fai | ±0.2% FS | ||||||
| Taimi Tali | ≤1sec | ≤0.8 sec (SEMI E17-0600) | |||||
| Tulaga Malolo Valve | E masani ona tapunia pe | Leai Valve | E masani ona tapunia pe | Leai Valve | E masani ona tapunia pe | Leai Valve | |
| E masani ona tatala（100 sccm≤FS≤5 slm） | E masani ona tatala（100 sccm≤FS≤5 slm） | E masani ona tatala（100 sccm≤FS≤5 slm） | |||||
| Omiga Eseese | 0.05～0.35MPa （Tafe≤10slm） | ＜0.02MPa | (0.05～0.35) MPa（≤10slm） | ＜0.02MPa | (0.05～0.35) MPa（≤10slm） | ＜0.02MPa | |
| 0.1～0.35MPa（10slm＜Tafe≤30slm） | (0.1～0.35) MPa（＞10slm） | (0.1～0.35) MPa（＞10slm） | |||||
| 0.2～0.45MPa（Tafe>30slm） | |||||||
| Omiga Fa'agaoioi maualuga | 0.45MPa | |||||
| vevela | Zero:≤±0.05% FS/℃; | Zero:≤±0.02% FS/℃;Avanoa:≤±0.05% FS/℃ | ||||
| Coefficient | Avanoa: ≤±0.1% FS/℃（Tafe≤30slm） | |||||
| Avanoa: ≤±0.2% FS/℃（Tafe>30slm） | ||||||
| Faʻamaoniga Faʻamalosi | 3MPa (435pisg) | |||||
| Zero Drift | ＜0.6%FS i le tausaga e aunoa ma le autozero | |||||
| Leak amio sa'o | 1×10-9 atm·cc / sec O ia | 1×10-10atm·cc / sec O ia | ||||
| Mea Susū | Viton; | Uamea?(Uamea Umea V/V, 5Ra) | Uamea | |||
| Kemisi Laufanua | —— | fua faatatau Cr/Fe ＞2.0;CrO mafiafia ＞20 Angstroms | ||||
| Fa'ai'uga | 25Ra | 10Ra | 25Ra | |||
| Galulue Vevela | (5～45） ℃ | (0～50） ℃ | ||||
| Fa'ailoga Fa'aofi | Numera: RS485 po'o ProfiBus | N/A | Numera: RS485 po'o ProfiBus po'o DeviceNetTM | N/A | Numera: RS485 po'o ProfiBus po'o DeviceNetTM | N/A |
| po'o le DeviceNetTM | Fa'atusa:(0~5)VDC po'o le (4~20)mA po'o le (0~20)mA | Analog:(0~5)VDC po'o (4~20)mA?po'o (0~20)mA | |||||
| Fa'atusa:(0~5)VDC po'o (4~20)mA po'o(0~20)mA | |||||||
| Fa'ailoga o Galuega | Numera: RS485 po'o le DeviceNetTM po'o le ProfiBus Analog:(0~5)VDC po'o le (4~20)mA po'o le (0~20)mA | ||||||
| Paoa sapalai | ±8 ~ ±16 VDC po'o le +14 ~ +28 VDC(400mA) | ||||||
| Feso'ota'i faaeletonika | 9 pine male sub-D ，15 pine male sub-D ，DeviceNetTM,ProfiBus, Analog | ||||||
| Mea fa'apipi'i | VCR1/4” M； VCO1/4” M; | VCR1/4” M; | |||||
| Fa'apipi'i Fa'apipi'iΦ10; Fa'apipi'i Fa'apipi'iΦ6; | Fa'apipi'i Fa'amauΦ6, | ||||||
| Fa'apipi'i Fa'amau 3/8”;Fa'apipi'i Fa'amau1/4”; | Fa'apipi'i Fa'amauΦ3, | ||||||
| Fa'apipi'i Fa'amau1/8”;Fa'apipi'i Fa'amauΦ3； | Fa'apipi'i Fa'amau1/4”， | ||||||
| Ф6(i totonu)×1faagaau;ф5(i totonu)×1.5faagaau;ф4(i totonu)×1faagaau; | W-faamaufaailoga, | ||||||
| A-saelu ; | C-faamaufaailoga | ||||||
| mamafa | 1kg | 0.8kg | 1.2kg | 1kg | 1.2kg | 1kg | |
