Motlakase oa Phallo ea Phallo ea Khase e Thermal (MFC) Setšoantšo se Featured

Molaoli oa Phallo ea Khase e Thermal (MFC)

Tlhaloso e Khutšoanyane:

Thermal gas mass flow controller (MFC) ha e na mosebetsi oa meter ea phallo ea boima feela, empa hape ho bohlokoa le ho feta e ka laola phallo ea khase ka bo eona e bolelang hore mosebelisi a ka beha phallo joalo ka kopo.MFC e tla lokisa phallo ho boleng bo behiloeng ka bo eona.Theko e behiloeng e ke ke ea kheloha le haeba khatello ea tsamaiso e fetoha kapa mocheso o potolohileng o fetoha.Ka bokhutšoane, molaoli oa phallo ea boima ke sesebelisoa se tsitsitseng sa phallo, ke sesebelisoa se tsitsitseng sa phallo ea khase se ka hlophisoang ka letsoho kapa sa laoloa ke komporo ka bo eona.

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Thermbolelemeseleftlasemeter(MFM)isakindofaccuratemeasuremnthofgasflow,the measuredvaluesarenotcontrolledbyflehlohonolotuatiosebengtemperatureorpressure, ha ho hlokahalethecompensationoftemperatureandpressure.

Mohlala	SQC-100
Mekhahlelo ea Phallo (N2)	0-5, 10, 20, 30, 50, 100, 200, 500SCCM
Mekhahlelo ea Phallo (N2)	0～1, 2, 3, 5, 10, 15, 20, 30SLM
Ho nepahala	±1％FS(≤15SLM);±2％FS(＞15SLM)
Mofuta oa koloi oa valve	Tloaelehileng Koaloe
Linearity	±1％FS(≤15SLM);±2％FS(＞15SLM)
Pheta-pheta	±0.2% FS
Nako ea Karabelo	≤1sec
Kenyeletso/sephetho Letshwao	0～5V
Kopano ea Motlakase	DB15 phini (nale)
Ts'ebetso ea Tem.	5℃45℃
Phapang Pele.	0.05 ~ 0.5MPa (MFC); 0.03 ~ 3.0MPa (MFM)
Leak Rate	1×10-8SCCS (He)
Max.Khatello	3MPa
Boitsebiso bo Bohareng	316L SS le thepa ea ho tiisa
Boitsebiso ba ho Tiisa	Viton, Silicone rabara, NBR, Teflon, Metal tiiso.
Boholo bo Kopanetsoeng	VCR 1/4”; Swagelok 1/8”, 1/4”; φ3, φ6mm
Phepelo ea motlakase	+15V,50mA;-15V,200mA

Mohlala	SQC-200
Mekhahlelo ea Phallo (N2)	MFC: 0-20, 30, 50, 100, 150, 200SLM
Mekhahlelo ea Phallo (N2)	MFM: 0–20, 30, 50, 100, 150, 200, 250, 300SLM
Ho nepahala	± 2% FS
Mofuta oa koloi oa valve	Tloaelehileng Koaloe
Linearity	± 2% FS
Pheta-pheta	±0.2% FS
Nako ea Karabelo	≤5sec
Kenyeletso/sephetho Letshwao	1 ~ 5V; 4 ~ 20mA
Kopano ea Motlakase	DB15 phini (nale)
Ts'ebetso ea Tem.	5℃45℃
Phapang Pele.	0.1–0.3MPa (MFC); 0.05～3.0MPa (MFM)
Leak Rate	1×10-8SCCS (He)
Max.Khatello	3MPa
Boitsebiso bo Bohareng	316L SS le thepa ea ho tiisa
Boitsebiso ba ho Tiisa	Viton, rabara ea silicone, NBR, ERP, Teflon
Boholo bo Kopanetsoeng	Swagelok 3/8”, 1/2”; φ8, φ10, φ12mm
Phepelo ea motlakase	24V,0.5A