Kidhibiti cha mtiririko wa gesi ya joto (MFC)
Thermmwanimpundafchinimeter(MFM)sakindofaccuratemeasurementofgasflow,the measuredvaluesarenotcontrolledbyfbahatituatiodhambitemperatureorpressure, hawana hajathekompensationoftemperatureandpressure.
| Mfano | SQC-100 |
| Masafa ya mtiririko (N2) | 0~5,10,20,30 ,50 ,100 ,200,500SCCM |
| 0~1, 2, 3, 5, 10, 15, 20, 30SLM | |
| Usahihi | ±1%FS(≤15SLM);±2%FS(>15SLM) |
| Aina ya Hifadhi ya Valve | Kawaida Imefungwa |
| Linearity | ±1%FS(≤15SLM);±2%FS(>15SLM) |
| Kuweza kurudiwa | ±0.2%FS |
| Muda wa Majibu | ≤1sek |
| Mawimbi ya pembejeo/pato | 0~5V |
| Pamoja ya Umeme | DB15 pini (sindano) |
| Operesheni Tem. | 5℃45℃ |
| Tofauti Pre. | 0.05 ~ 0.5MPa (MFC); 0.03 ~ 3.0MPa (MFM) |
| Kiwango cha Uvujaji | 1×10-8SCCS (Yeye) |
| Max.Shinikizo | 3MPa |
| Nyenzo ya Kati | 316L SS na nyenzo za kuziba |
| Nyenzo ya Kufunga | Viton, Mpira wa Silicone, NBR, Teflon, Muhuri wa Metal. |
| Ukubwa wa Pamoja | VCR 1/4”; Swagelok 1/8” 、 1/4”; φ3, φ6mm |
| Ugavi wa Nguvu | +15V,50mA;-15V,200mA |
| Mfano | SQC-200 |
| Masafa ya mtiririko (N2) | MFC:0~20,30,50,100,150,200SLM |
| MFM:0~20 ,30 ,50,100 ,150, 200 ,250,300SLM | |
| Usahihi | ±2%FS |
| Aina ya Hifadhi ya Valve | Kawaida Imefungwa |
| Linearity | ±2%FS |
| Kuweza kurudiwa | ±0.2%FS |
| Muda wa Majibu | ≤5sekunde |
| Mawimbi ya pembejeo/pato | 1~5V;4~20mA |
| Pamoja ya Umeme | DB15 pini (sindano) |
| Operesheni Tem. | 5℃45℃ |
| Tofauti Pre. | 0.1 ~ 0.3MPa (MFC); 0.05 ~ 3.0MPa (MFM) |
| Kiwango cha Uvujaji | 1×10-8SCCS (Yeye) |
| Max.Shinikizo | 3MPa |
| Nyenzo ya Kati | 316L SS na nyenzo za kuziba |
| Nyenzo ya Kufunga | Viton, mpira wa Silicone, NBR, ERP, Teflon |
| Ukubwa wa Pamoja | Swagelok 3/8” , 1/2”; φ8, φ10, φ12mm |
| Ugavi wa Nguvu | 24V,0.5A |
Andika ujumbe wako hapa na ututumie


