Thermal gas Mass Flow Controller (MFC)
Thermal gas mass flow controller (MFC) not only has the function of mass flow meter, but also more important it can control the gas flow automatically that means the user can set the flow as request. MFC will fix the flow on the set value automatically. The set value will be not deviated even if the system pressure fluctuations or surrounding temperature changes. In short, the mass flow controller is a flow stable device, is a gas flow stable device can be programmed manually or controlled by a computer automatically.
| Model | SQC-100 |
| Ranges of Flow (N2) | 0～5，10，20，30，50，100，200，500SCCM |
| 0～1, 2, 3, 5, 10, 15, 20, 30SLM | |
| Accuracy | ±1％F.S.(≤15SLM)；?2％F.S.(＞15SLM) |
| Valve Drive Type | Normal Closed |
| Linearity | ±1％F.S.(≤15SLM)；?2％F.S.(＞15SLM) |
| Repeatability | ±0.2％F.S. |
| Response Time | ≤1sec |
| Input/output Signal | 0～5V |
| Electric Joint | DB15 pin (needle) |
| Operation Tem. | 5～45℃ |
| Differential Pre. | 0.05～0.5MPa（MFC）；0.03～3.0MPa（MFM） |
| Leak Rate | 1×10-8SCCS（He） |
| Max. Pressure | 3MPa |
| Medium Material | 316L SS and sealing material |
| Sealing Material | Viton, Silicone rubber, NBR, Teflon,Metal seal. |
| Joint Size | VCR 1/4”；Swagelok 1/8?、1/4?；φ3、φ6mm |
| Power Supply | +15V,50mA；-15V,200mA |
| Model | SQC-200 |
| Ranges of Flow (N2) | MFC：0～20，30，50，100，150，200SLM |
| MFM：0～20，30，50，100，150， 200，250，300SLM | |
| Accuracy | ±2％F.S. |
| Valve Drive Type | Normal Closed |
| Linearity | ±2％F.S. |
| Repeatability | ±0.2％F.S. |
| Response Time | ≤5sec |
| Input/output Signal | 1～5V；4～20mA |
| Electric Joint | DB15 pin (needle) |
| Operation Tem. | 5～45℃ |
| Differential Pre. | 0.1～0.3MPa（MFC）；0.05～3.0MPa（MFM） |
| Leak Rate | 1×10-8SCCS（He） |
| Max. Pressure | 3MPa |
| Medium Material | 316L SS and sealing material |
| Sealing Material | Viton, Silicone rubber, NBR, ERP, |
| Joint Size | Swagelok 3/8”、1/2?； φ8、φ10、φ12mm φ12mmφ12mm |
| Power Supply | 24V,0.5A |
