Thermal Gas Mass Flow Meter (MFM)
Thermal gas mass flow meter (MFM) is a kind of accurate measurement of gas flow, the measured values are not controlled by fluctuations in temperature or pressure, do not need the compensation of temperature and pressure.
Model | SQM-100 |
Ranges of Flow (N2) | 0~5,10,20,30,50,100,200, 500SCCM |
0~1, 2, 3, 5, 10, 15, 20, 30SLM | |
Accuracy | ±1%F.S.(≤15SLM);?2%F.S.(>15SLM) |
Valve Drive Type | Normal Closed |
Linearity | ±1%F.S.(≤15SLM);?2%F.S.(>15SLM) |
Repeatability | ±0.2%F.S. |
Response Time | ≤1sec |
Input/output Signal | 0~5V |
Electric Joint | DB15 pin (needle) |
Operation Tem. | 5~45℃ |
Differential Pre. | 0.05~0.5MPa(MFC);0.03~3.0MPa (MFM) |
Leak Rate | 1×10-8SCCS(He) |
Max. Pressure | 3MPa |
Medium Material | 316L SS and sealing material |
Sealing Material | Viton, Silicone rubber, NBR, Teflon, Metal seal. |
Joint Size | VCR 1/4”;Swagelok 1/8?、1/4?;φ3、 φ6mm |
Power Supply | +15V,50mA;-15V,200mA |
Model | SQM-200 |
Ranges of Flow (N2) | MFC:0~20,30,50,100,150, 200SLM |
MFM:0~20,30,50,100,150, 200,250,300SLM | |
Accuracy | ±2%F.S. |
Valve Drive Type | Normal Closed |
Linearity | ±2%F.S. |
Repeatability | ±0.2%F.S. |
Response Time | ≤5sec |
Input/output Signal | 1~5V;4~20mA |
Electric Joint | DB15 pin (needle) |
Operation Tem. | 5~45℃ |
Differential Pre. | 0.1~0.3MPa(MFC);0.05~3.0MPa (MFM) |
Leak Rate | 1×10-8SCCS(He) |
Max. Pressure | 3MPa |
Medium Material | 316L SS and sealing material |
Sealing Material | Viton, Silicone rubber, NBR, ERP, |
Joint Size | Swagelok 3/8”、1/2?; φ8、φ10、φ12mm
φ12mmφ12mm |
Power Supply | 24V,0.5A |