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  • Thermal Gas Mass Flow Meter (MFM)

  • Thermal Gas Mass Flow Meter (MFM)

Thermal Gas Mass Flow Meter (MFM)

Thermal gas mass flow meter (MFM) is a kind of accurate measurement of gas flow, the measured values are not controlled by fluctuations in temperature or pressure, do not need the compensation of temperature and pressure.

Thermal Gas Mass Flow Meter (MFM)

Model

SQM-100

 

 

Ranges of Flow (N2)

0~5,10,2030,50100200

500SCCM

01, 2, 3, 5, 10, 15, 20, 30SLM

Accuracy

±1F.S.(≤15SLM)?2F.S.(15SLM)

Valve Drive Type

Normal Closed

Linearity

±1F.S.(≤15SLM)?2F.S.(15SLM)

Repeatability

±0.2F.S.

Response Time

1sec

Input/output Signal

05V

Electric Joint

DB15 pin (needle)

Operation Tem.

545

 

 Differential Pre.

0.050.5MPaMFC);0.033.0MPa

MFM

Leak Rate

1×10-8SCCSHe

Max. Pressure

3MPa

Medium Material

316L SS and sealing material

 

 

Sealing Material

Viton, Silicone rubber, NBR, Teflon,

Metal seal.

 

 

Joint Size

VCR 1/4Swagelok 1/8?1/4?φ3

φ6mm

Power Supply

+15V,50mA-15V,200mA

Thermal Gas Mass Flow Meter (MFM)

Model

SQM-200

 

 

 

Ranges of Flow (N2)

MFC0203050100150

200SLM

 

MFM0203050100150200250300SLM

Accuracy

±2F.S.

Valve Drive Type

Normal Closed

Linearity

±2F.S.

Repeatability

±0.2F.S.

Response Time

5sec

Input/output Signal

15V420mA

Electric Joint

DB15 pin (needle)

Operation Tem.

545

 

 

Differential Pre.

0.10.3MPaMFC0.053.0MPa

MFM

Leak Rate

1×10-8SCCSHe

Max. Pressure

3MPa

Medium Material

316L SS and sealing material

Sealing Material

Viton, Silicone rubber, NBR, ERP,


Joint Size

Swagelok 3/8”1/2? φ8φ10φ12mm

 

φ12mmφ12mm

Power Supply

24V,0.5A


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