Thermal gas Mass Flow Controller (MFC)
Angrmalgasmpuwetfmababameter(MFM)isakindofaccuratemeasurementofgasflow,the measuredvalueserenotcontrolledbyfluctuationsintemperatureorpressure, hindi kailanganthecompensationoftemperatureandpressure.
| Modelo | SQC-100 |
| Mga Saklaw ng Daloy (N2) | 0~5,10,20,30,50,100,200,500SCCM |
| 0~1, 2, 3, 5, 10, 15, 20, 30SLM | |
| Katumpakan | ±1%FS(≤15SLM);±2%FS(>15SLM) |
| Uri ng Valve Drive | Normal Sarado |
| Linearity | ±1%FS(≤15SLM);±2%FS(>15SLM) |
| Pag-uulit | ±0.2%FS |
| Oras ng pagtugon | ≤1seg |
| Input/output Signal | 0~5V |
| Electric Joint | DB15 pin (karayom) |
| Operation Tem. | 5~45℃ |
| Differential Pre. | 0.05~0.5MPa (MFC); 0.03~3.0MPa (MFM) |
| Rate ng Leak | 1×10-8SCCS (Siya) |
| Max.Presyon | 3MPa |
| Katamtamang Materyal | 316L SS at sealing material |
| Materyal ng Pagtatak | Viton, Silicone rubber, NBR, Teflon, Metal seal. |
| Sukat ng Pinagsanib | VCR 1/4”;Swagelok 1/8” 、1/4”;φ3、 φ6mm |
| Power Supply | +15V,50mA;-15V,200mA |
| Modelo | SQC-200 |
| Mga Saklaw ng Daloy (N2) | MFC:0~20,30,50,100,150,200SLM |
| MFM:0~20 ,30 ,50,100,150,200,250,300SLM | |
| Katumpakan | ±2%FS |
| Uri ng Valve Drive | Normal Sarado |
| Linearity | ±2%FS |
| Pag-uulit | ±0.2%FS |
| Oras ng pagtugon | ≤5seg |
| Input/output Signal | 1~5V;4~20mA |
| Electric Joint | DB15 pin (karayom) |
| Operation Tem. | 5~45℃ |
| Differential Pre. | 0.1~0.3MPa(MFC); 0.05~3.0MPa (MFM) |
| Rate ng Leak | 1×10-8SCCS (Siya) |
| Max.Presyon | 3MPa |
| Katamtamang Materyal | 316L SS at sealing material |
| Materyal ng Pagtatak | Viton, Silicone na goma, NBR, ERP, Teflon |
| Sukat ng Pinagsanib | Swagelok 3/8” 、1/2”; φ8、φ10、φ12mm |
| Power Supply | 24V,0.5A |
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