Turbo Molecular Pump
EV-3600 The impeller of turbomolecular pump adopts the variable cross-section blade teeth originally invented in China, which enhances the blade strength, reduces the weight of the rotor, shortens the start-up time, reduces the mechanical loss and increases the service life.
Profile dimensions and mounting connections of turbo-molecular pumps
EV-3600 Technical Data
| Inlet Flange (mm) | 400 ISO - K | |
| Outlet Flange (mm) | 100 ISO - K | |
| Pumping Rate（L/S） | 3600 | |
| Compression Ratio | N2 | >108 |
| H2 | >5X102 | |
| Ultimate Pressure（Pa） | <2X10-6 | |
| Rated Speed（rpm） | 13500 | |
| Vibration | ≤0.15 μm | |
| Starting Time（min） | <11 | |
| Stop Time（min） | <20 | |
| Suggested rotary pump | 30-70 L/S | |
| Cooling Method | Water-cooling | |
| Temperature of Water Cooling(℃) | ≤25 | |
| The flow of water cooling（L/min） | 2 | |
| Pump Body Baking Temperature | <120℃ | |
| Installation Mode | Vertical ±5° | |
| Weight（kg） | ≈100 | |
