Issiqlik gazining massa oqimini boshqarish moslamasi (MFC)
Thermsuv o'tlarimeshakfpastmeter(MFM)isakindofaccuratemeasurementofgasflow,the measuredvalfoydalaniladinotcontrolledbyfomadtuationsintemperatureorpresskerak emasthecompensationoftemperatuandpressure.
| Model | SQC-100 |
| Oqim diapazonlari (N2) | 0~5,10,20,30,50,100,200,500SCCM |
| 0~1, 2, 3, 5, 10, 15, 20, 30SLM | |
| Aniqlik | ±1%FS(≤15SLM);±2%FS(>15SLM) |
| Valf haydovchi turi | Oddiy yopiq |
| Chiziqlilik | ±1%FS(≤15SLM);±2%FS(>15SLM) |
| Takroriylik | ±0,2% FS |
| Javob vaqti | ≤1sek |
| Kirish/chiqish signali | 0~5V |
| Elektr birikmasi | DB15 pin (igna) |
| Operatsion Tem. | 5~45℃ |
| Differensial Pre. | 0,05~0,5MPa (MFC); 0,03~3,0MPa(MFM) |
| Oqish darajasi | 1 × 10-8SCCS (U) |
| Maks.Bosim | 3MPa |
| O'rta material | 316L SS va muhrlash materiallari |
| Plomba materiali | Viton, Silikon kauchuk, NBR, Teflon, Metall muhr. |
| Birgalikda hajmi | Videomagnitofon 1/4”;Swagelok 1/8” 、1/4”;ph3、 ph6mm |
| Quvvatlantirish manbai | +15V,50mA;-15V,200mA |
| Model | SQC-200 |
| Oqim diapazonlari (N2) | MFC: 0~20,30,50,100,150, 200SLM |
| MFM: 0~20, 30, 50, 100, 150, 200, 250, 300SLM | |
| Aniqlik | ±2%FS |
| Valf haydovchi turi | Oddiy yopiq |
| Chiziqlilik | ±2%FS |
| Takroriylik | ±0,2% FS |
| Javob vaqti | ≤5 sek |
| Kirish/chiqish signali | 1~5V;4~20mA |
| Elektr birikmasi | DB15 pin (igna) |
| Operatsion Tem. | 5~45℃ |
| Differensial Pre. | 0,1~0,3MPa(MFC); 0,05~3,0MPa(MFM) |
| Oqish darajasi | 1 × 10-8SCCS (U) |
| Maks.Bosim | 3MPa |
| O'rta material | 316L SS va muhrlash materiallari |
| Plomba materiali | Viton, Silikon kauchuk, NBR, ERP, Teflon |
| Birgalikda hajmi | Swagelok 3/8” 、 1/2” ; ph8 、 ph10 、 ph 12 mm |
| Quvvatlantirish manbai | 24V, 0,5A |
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