IsiLawuli sokuHamba koMninzi werhasi yoThermal (MFC) Umfanekiso obonakalayo

IsiLawuli sokuHamba kokuHamba kwerhasi yoThermal (MFC)

Inkcazelo emfutshane:

Isilawuli sokuhamba kwegesi ye-thermal (MFC) ayinayo kuphela umsebenzi wemitha yokuhamba ngobuninzi, kodwa kubaluleke ngakumbi inokulawula ukuhamba kwegesi ngokuzenzekelayo oko kuthetha ukuba umsebenzisi unokuseta ukuhamba njengesicelo.I-MFC iya kulungisa ukuhamba kwixabiso elimiselweyo ngokuzenzekelayo.Ixabiso elibekiweyo aliyi kuphambukiswa nokuba inkqubo yokuguquguquka koxinzelelo lwenkqubo okanye utshintsho olujikelezileyo lobushushu.Ngamafutshane, isilawuli se-mass flow flow sisixhobo esizinzile, isixhobo esizinzile sokuhamba kwegesi sinokucwangciswa ngesandla okanye silawulwe yikhompyuter ngokuzenzekelayo.

Thumela i-imeyile kuthi

Iinkcukacha zeMveliso

Iithegi zeMveliso

Irmubulembumiimpundufphantsimeter(MFM)isakkunyeofaccuratemeasuremintofgasflow,the measuredvaluesarenotcontrolledbyfluctuatioisonoixeshaiperatureorpresshayi, awufunithecompensationoftemperatureandpressure.

Umzekelo	SQC-100
Uluhlu lokuHamba (N2)	0～5, 10, 20, 30, 50, 100, 200, 500SCCM
Uluhlu lokuHamba (N2)	0～1, 2, 3, 5, 10, 15, 20, 30SLM
Ukuchaneka	±1％FS(≤15SLM);±2％FS(＞15SLM)
Uhlobo lweValve Drive	Okuqhelekileyo Kuvaliwe
Umgca	±1％FS(≤15SLM);±2％FS(＞15SLM)
Ukuphindaphinda	±0.2％FS
Ixesha lokuphendula	≤1umzuzwana
Igalelo/imveliso Umqondiso	0～5V
Ukudityaniswa koMbane	DB15 pin (inaliti)
Umsebenzi Tem.	5℃45℃
Umahluko Pre.	0.05～0.5MPa (MFC); 0.03～3.0MPa (MFM)
Ireyithi yokuvuza	1×10-8SCCS (yena)
Max.Uxinzelelo	3MPa
Izinto eziPhakathi	I-316L SS kunye nezixhobo zokutywina
Izinto Zokutywina	Viton, irabha Silicone, NBR, Teflon, Metal seal.
Ubungakanani obudibeneyo	VCR 1/4”;Swagelok 1/8”, 1/4”; φ3, φ6mm
Ukunikezwa Amandla	+15V,50mA;-15V,200mA

Umzekelo	SQC-200
Uluhlu lokuHamba (N2)	MFC: 0-20, 30, 50, 100, 150, 200SLM
Uluhlu lokuHamba (N2)	I-MFM: 0-20, 30, 50, 100, 150, 200, 250, 300SLM
Ukuchaneka	±2％FS
Uhlobo lweValve Drive	Okuqhelekileyo Kuvaliwe
Umgca	±2％FS
Ukuphindaphinda	±0.2％FS
Ixesha lokuphendula	≤5sec
Igalelo/imveliso Umqondiso	1～5V;4～20mA
Ukudityaniswa koMbane	DB15 pin (inaliti)
Umsebenzi Tem.	5℃45℃
Umahluko Pre.	0.1～0.3MPa (MFC); 0.05～3.0MPa (MFM)
Ireyithi yokuvuza	1×10-8SCCS (yena)
Max.Uxinzelelo	3MPa
Izinto eziPhakathi	I-316L SS kunye nezixhobo zokutywina
Izinto Zokutywina	Viton, irabha yeSilicone, NBR, ERP, Teflon
Ubungakanani obudibeneyo	I-Swagelok 3/8” , 1/2”; φ8, φ10, φ12mm
Ukunikezwa Amandla	24V,0.5A