Adarí Sisan Gaasi Gbona (MFC) Aworan ti a ṣe afihan

Adarí Ṣiṣan Gaasi Gbona (MFC)

Apejuwe kukuru:

Alabojuto ṣiṣan gaasi ti o gbona (MFC) kii ṣe iṣẹ ti mita ṣiṣan pupọ, ṣugbọn tun ṣe pataki diẹ sii o le ṣakoso ṣiṣan gaasi laifọwọyi ti o tumọ si pe olumulo le ṣeto sisan bi ibeere.MFC yoo ṣatunṣe sisan lori iye ṣeto laifọwọyi.Iye ṣeto kii yoo yapa paapaa ti awọn iyipada titẹ eto tabi iwọn otutu agbegbe ba yipada.Ni kukuru, oluṣakoso ṣiṣan ti o pọju jẹ ẹrọ iduroṣinṣin ṣiṣan, jẹ ẹrọ iduroṣinṣin ṣiṣan gaasi le ṣe eto pẹlu ọwọ tabi ṣakoso nipasẹ kọnputa laifọwọyi.

Fi imeeli ranṣẹ si wa

Alaye ọja

ọja Tags

Awọnrmewemkẹtẹkẹtẹfkekeremeter(MFM) Isakindofaccuratemeasurementofgasflow,the measuredvalesarenotcontrolledbyfLuctuationsintemperatureorpressure, ko nilothekompensationoftemperatureandpressure.

Awoṣe	SQC-100
Awọn sakani ti Sisan (N2)	0～5,10,20,30,50,100,200,500SCCM
Awọn sakani ti Sisan (N2)	0～1, 2, 3, 5, 10, 15, 20, 30SLM
Yiye	± 1％FS(≤15SLM)：2％FS(15SLM)
Àtọwọdá wakọ Type	Deede Pipade
Ìlànà	± 1％FS(≤15SLM)：2％FS(15SLM)
Atunṣe	± 0.2 FS
Akoko Idahun	≤1 iṣẹju-aaya
Ifihan agbara titẹ sii/jade	0～5V
Ina Apapo	DB15 pin (abẹrẹ)
Tem iṣẹ.	5～45℃
Iyatọ Pre.	0.05 ~ 0.5MPa (MFC) lati 0.03 ~ 3.0MPa (MFM)
Oṣuwọn jo	1×10-8SCCS (Oun)
O pọju.Titẹ	3MPa
Ohun elo Alabọde	316L SS ati lilẹ ohun elo
Ohun elo Lidi	Viton, rọba Silikoni, NBR, Teflon, Igbẹhin irin.
Apapọ Iwon	VCR 1/4"; Swagelok 1/8" 1/4"; φ3, φ6mm
Ibi ti ina elekitiriki ti nwa	+ 15V,50mA;-15V,200mA

Awoṣe	SQC-200
Awọn sakani ti Sisan (N2)	MFC: 0 ~ 20, 30, 50, 100, 150, 200SLM
Awọn sakani ti Sisan (N2)	MFM: 0 ~ 20, 30, 50, 100, 150, 200, 250, 300SLM.
Yiye	± 2 FS
Àtọwọdá wakọ Type	Deede Pipade
Ìlànà	± 2 FS
Atunṣe	± 0.2 FS
Akoko Idahun	≤5 iṣẹju-aaya
Ifihan agbara titẹ sii/jade	1～5V;4~20mA
Ina Apapo	DB15 pin (abẹrẹ)
Tem iṣẹ.	5～45℃
Iyatọ Pre.	0.1 ~ 0.3MPa (MFC) 0.05 ~ 3.0MPa (MFM)
Oṣuwọn jo	1×10-8SCCS (Oun)
O pọju.Titẹ	3MPa
Ohun elo Alabọde	316L SS ati lilẹ ohun elo
Ohun elo Lidi	Viton, rọba Silikoni, NBR, ERP, Teflon
Apapọ Iwon	Swagelok 3/8 ", 1/2"; φ8, φ10, φ12mm
Ibi ti ina elekitiriki ti nwa	24V,0.5A