Onye na-ahụ maka ikuku gas na-ekpo ọkụ (MFC)
Nkermalgasmịnyịnya ibufalameter(MFM) Isakindofaccuratemeasuremntinyegasflow,the measuredvalizunotcontrolledbyfluctuationsintemperatureorpressure, achọghịthecompensationoftemperatureandpressure.
| Nlereanya | SQC-100 |
| Ogo nke ọsọ (N2) | 0～5,10,20,30,50,100,200,500SCCM |
| 0～1, 2, 3, 5, 10, 15, 20, 30SLM | |
| izi ezi | ±1％FS(≤15SLM)：2％FS(15SLM) |
| Ụdị Valve Drive | Emechiri nkịtị |
| Linearity | ±1％FS(≤15SLM)：2％FS(15SLM) |
| Nkwagharị ugboro ugboro | ± 0.2 FS |
| Oge nzaghachi | ≤1 nkeji |
| Ihe nrịbama ntinye/mpụta | 0 ~ 5V |
| Njikọ eletrik | DB15 pin ( agịga ) |
| Ọrụ Tem. | 5 45 ℃ |
| Ọdịiche Pre. | 0.05 ~ 0.5MPa (MFC); 0.03 ~ 3.0MPa (MFM) |
| Ọnụ ego ntapu | 1 × 10-8SCCS (Ọ) |
| Oke.Nrụgide | 3MPa |
| Ihe Ọkara | 316L SS na akara ihe |
| Ihe mkpuchi | Viton, silicone roba, NBR, Teflon, Metal akara. |
| Nha nkwonkwo | VCR 1/4 "; Swagelok 1/8" , 1/4 "; φ3, φ6mm |
| Ịnye ọkụ | + 15V,50mA;-15V,200mA |
| Nlereanya | SQC-200 |
| Ogo nke ọsọ (N2) | MFC: 0 ~ 20, 30, 50, 100, 150, 200SLM |
| MFM: 0 ~ 20, 30, 50, 100, 150, 200, 250, 300SLM | |
| izi ezi | ± 2 FS |
| Ụdị Valve Drive | Emechiri nkịtị |
| Linearity | ± 2 FS |
| Nkwagharị ugboro ugboro | ± 0.2 FS |
| Oge nzaghachi | ≤5 sekọnd |
| Ihe nrịbama ntinye/mpụta | 1 5V; 4-20mA |
| Njikọ eletrik | DB15 pin ( agịga ) |
| Ọrụ Tem. | 5 45 ℃ |
| Ọdịiche Pre. | 0.1 ~ 0.3MPa (MFC); 0.05 ~ 3.0MPa (MFM) |
| Ọnụ ego ntapu | 1 × 10-8SCCS (Ọ) |
| Oke.Nrụgide | 3MPa |
| Ihe Ọkara | 316L SS na akara ihe |
| Ihe mkpuchi | Viton, rọba silicone, NBR, ERP, Teflon |
| Nha nkwonkwo | Swagelok 3/8 ", 1/2"; φ8, φ10, φ12mm |
| Ịnye ọkụ | 24V,0.5A |
Dee ozi gị ebe a ziga anyị ya
