Kontrolkerê Herikîna Komê ya Gaza Termal (MFC)
Ewrmalgasmassfnizmmeter(MFM)isakindofaccuratemeasurementofgasflow,the measuredvaluesarenotcontrolledbyfluctuationsintemperatureorpresserê, ne hewce yethecompensationoftemperatureandpressure.
| Cins | SQC-100 |
| Rêjeyên Herikê (N2) | 0, 5, 10, 20, 30, 50, 100, 200, 500SCCM |
| 0~1, 2, 3, 5, 10, 15, 20, 30SLM | |
| Tamî | ±1%FS(≤15SLM);±2%FS(>15SLM) |
| Cureya ajokera Valve | Normal Girtî |
| Linearity | ±1%FS(≤15SLM);±2%FS(>15SLM) |
| Repeatability | ± 0,2%FS |
| Dema bersivê | ≤1sec |
| Input / îşareta derketinê | 0~5V |
| Electric Joint | DB15 pin (derzî) |
| Operasyona Tem. | 5~45℃ |
| Differential Pre. | 0,05~0,5MPa (MFC); 0,03~3,0MPa (MFM) |
| Rêjeya Leak | 1×10-8SCCS (Ew) |
| Max.Çap | 3MPa |
| Medium Material | 316L SS û materyalê morkirinê |
| Girtina Material | Viton, goma Silicone, NBR, Teflon, Seal Metal. |
| Mezinahiya Hevbeş | VCR 1/4”;Swagelok 1/8” 、1/4”;φ3、 φ6mm |
| Navê min | +15V,50mA;-15V,200mA |
| Cins | SQC-200 |
| Rêjeyên Herikê (N2) | MFC: 0~20, 30, 50, 100, 150, 200SLM |
| MFM: 0~20, 30, 50, 100, 150, 200, 250, 300 SLM | |
| Tamî | ± 2%FS |
| Cureya ajokera Valve | Normal Girtî |
| Linearity | ± 2%FS |
| Repeatability | ± 0,2%FS |
| Dema bersivê | ≤5sec |
| Input / îşareta derketinê | 1~5V;4~20mA |
| Electric Joint | DB15 pin (derzî) |
| Operasyona Tem. | 5~45℃ |
| Differential Pre. | 0,1~0,3MPa(MFC); 0,05~3,0MPa (MFM) |
| Rêjeya Leak | 1×10-8SCCS (Ew) |
| Max.Çap | 3MPa |
| Medium Material | 316L SS û materyalê morkirinê |
| Girtina Material | Viton, Lastîka silicone, NBR, ERP, Teflon |
| Mezinahiya Hevbeş | Swagelok 3/8" 、1/2"; φ8 、φ10、φ12mm |
| Navê min | 24V,0.5A |
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