Thermal gasi Mass Flow Controller (MFC)

Tsanangudzo Pfupi

Thermal gas mass flow controller (MFC) haingove nebasa remamita ekuyerera kwemamita, asi zvakanyanya kukosha inogona kudzora kuyerera kwegasi otomatiki zvinoreva kuti mushandisi anogona kuseta kuyerera sekukumbira.MFC inogadzirisa kuyerera pane yakatarwa kukosha otomatiki.Iko kukosha kweseti hakuzotsauswa kunyangwe kana system yekumanikidza kushanduka kana tembiricha yakatenderedza ichichinja.Muchidimbu, iyo mass flow controller inoyerera yakagadzikana mudziyo, igasi inoyerera yakagadzikana mudziyo unogona kurongwa nemaoko kana kudzorwa nekombuta otomatiki.

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Thermalgasmassflowmeter(MFM)isakindofaccuratemeasurementofgasflow,the measuredvaluesarenotcontrolledbyfluctuatiosinntemperatureorpressure, dont needthecompensationoftemperatureandpressure.

Model	SQC-100
Ranges of Flow (N2)	0～5,10,20,30,50,100,200,500SCCM
Ranges of Flow (N2)	0～1, 2, 3, 5, 10, 15, 20, 30SLM
Kururama	±1％FS(≤15SLM) ±2％FS(＞15SLM)
Valve Drive Type	Normal Yakavharwa
Linearity	±1％FS(≤15SLM) ±2％FS(＞15SLM)
Kudzokorora	±0.2％FS
Nguva Yekupindura	≤1sec
Input/output Signal	0～5V
Electric Joint	DB15 pini (tsono)
Operation Tem.	5～45℃
Differential Pre.	0.05～0.5MPa (MFC); 0.03～3.0MPa (MFM)
Leak Rate	1×10-8SCCS (Iye)
Max.Pressure	3MPa
Medium Material	316L SS uye yekuisa chisimbiso zvinhu
Kuisa Chisimbiso	Viton, Silicone rabha, NBR, Teflon, Metal chisimbiso.
Joint Size	VCR 1/4”;Swagelok 1/8” , 1/4”; φ3, φ6mm
Magetsi	+15V,50mA;-15V,200mA

Model	SQC-200
Ranges of Flow (N2)	MFC: 0-20, 30, 50, 100, 150, 200SLM
Ranges of Flow (N2)	MFM: 0-20, 30, 50, 100, 150, 200, 250, 300SLM
Kururama	±2％FS
Valve Drive Type	Normal Yakavharwa
Linearity	±2％FS
Kudzokorora	±0.2％FS
Nguva Yekupindura	≤5sec
Input/output Signal	1～5V;4～20mA
Electric Joint	DB15 pini (tsono)
Operation Tem.	5～45℃
Differential Pre.	0.1～0.3MPa(MFC); 0.05～3.0MPa (MFM)
Leak Rate	1×10-8SCCS (Iye)
Max.Pressure	3MPa
Medium Material	316L SS uye yekuisa chisimbiso zvinhu
Kuisa Chisimbiso	Viton, Silicone rabha, NBR, ERP, Teflon
Joint Size	Swagelok 3/8” , 1/2”; φ8, φ10, φ12mm
Magetsi	24V,0.5A