Kontrol Aliran Massa gas termal (MFC)
Thermganggangmburitfhandapmeter(MFM) nyaétakindofaccuratemeasurementofgasflow,the measuredvalusarnotcontrolledbyfluctuationsintemperatureorpressuih, teu butuhthecompensationoftemperaturehandpressure.
| Modél | SQC-100 |
| Rentang Aliran (N2) | 0~5,10,20,30,50,100,200,500SCCM |
| 0~1, 2, 3, 5, 10, 15, 20, 30SLM | |
| Akurasi | ± 1%FS(≤15SLM);±2%FS((15SLM) |
| Tipe Girang klep | Biasa Ditutup |
| Linearitas | ± 1%FS(≤15SLM);±2%FS((15SLM) |
| Repeatability | ± 0,2%FS |
| Waktu Tanggapan | ≤1 detik |
| Sinyal input / kaluaran | 0~5V |
| Sambungan Listrik | DB15 pin (jarum) |
| Operasi Tem. | 5 ~ 45 ℃ |
| Diferensial Pra. | 0.05~0.5MPa (MFC); 0.03~3.0MPa (MFM) |
| Laju Bocor | 1×10-8SCCS (Nya) |
| Max.Tekanan | 3MPa |
| Bahan Sedeng | 316L SS jeung bahan sealing |
| Bahan Sealing | Viton, Silicone karét, NBR, Teflon, Metal segel. |
| Ukuran Joint | VCR 1/4”; Swagelok 1/8” 、1/4”;φ3, φ6mm |
| Sasayogian tanaga | + 15V, 50mA;-15V, 200mA |
| Modél | SQC-200 |
| Rentang Aliran (N2) | MFC: 0~20,30,50,100,150,200SLM |
| MFM: 0 ~ 20 , 30 , 50 , 100 , 150 , 200 , 250 , 300 SLM | |
| Akurasi | ± 2%FS |
| Tipe Girang klep | Biasa Ditutup |
| Linearitas | ± 2%FS |
| Repeatability | ± 0,2%FS |
| Waktu Tanggapan | ≤5 detik |
| Sinyal input / kaluaran | 1 ~ 5V; 4 ~ 20mA |
| Sambungan Listrik | DB15 pin (jarum) |
| Operasi Tem. | 5 ~ 45 ℃ |
| Diferensial Pra. | 0.1~0.3MPa(MFC); 0.05~3.0MPa(MFM) |
| Laju Bocor | 1×10-8SCCS (Nya) |
| Max.Tekanan | 3MPa |
| Bahan Sedeng | 316L SS jeung bahan sealing |
| Bahan Sealing | Viton, karét silikon, NBR, ERP, Teflon |
| Ukuran Joint | Swagelok 3/8" 1/2" φ8,φ10,φ12mm |
| Sasayogian tanaga | 24V, 0,5A |
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