Amaphampu e-molecular ahlanganisiwe echungechunge lwe-EV
Idatha yezobuchwepheshe yochungechunge lwe-EV
| Imodeli | I-EV-600 I-EV-600F | I-EV-1200 I-EV-1200F | I-EV-1600 I-EV-1600F | ||||
| I-Inlet Flange (mm) | 150 CF | 160 ISO-K | 200 CF | 200 ISO-K | 250 CF | 250 ISO-K | |
| I-Outlet Flange(mm) | 40 kf | 40 kf | 50 kf | ||||
| Isivinini Sokumpompa(L/S) | 600 | 1200 | 1600 | ||||
| Isilinganiso sokucindezela | N2 | >109 | >109 | >109 | |||
| H2 | >8X103 | >1X104 | >1X104 | ||||
| I-Ultimate Vacuum(Pa) | <8X10-8 | <5X10-7 | <8X10-8 | <5X10-7 | <8X10-8 | <5X10-7 | |
| Isivinini Sokuzungezisa(rpm) | 24000 | 24000 | 24000 | ||||
| Ukudlidliza | ≤0.1 μm | ≤0.1 μm | ≤0.15 μm | ||||
| Isikhathi Sokuqalisa(imizuzu) | <4.5 | <5 | <6 | ||||
| I-Backing Pump | 4-8 L/S | 8-15 L/S | 15 L/S | ||||
| Indlela Yokupholisa | Ukupholisa amanzi(umoya). | Ukupholisa amanzi(umoya). | Ukupholisa amanzi(umoya). | ||||
| Izinga Lokushisa Lamanzi Okupholisa (℃) | ≤20 | ≤20 | ≤20 | ||||
| I-Ambient Temperature (℃) | ≤35 | ≤35 | ≤35 | ||||
| Ukupholisa Ubuningi bokugeleza kwamanzi | 1-2 L/min | 1-2 L/min | 1-2 L/min | ||||
| I-Bake-out Temperature (℃) | <120 | <120 | <120 | ||||
| Amandla Okushisa (w) | <250 | <300 | <300 | ||||
| I-Voltage ye-Heater Input (v) | I-AC220 | I-AC220 | I-AC220 | ||||
| Ukukhweza | Iqondile ±5° | Iqondile ±5° | Iqondile ±5° | ||||
| Isisindo(kg) | ≈25 | ≈29 | ≈31 | ||||
Ijika le-Atmospheric Pumping of Compound
Iphampu ye-molecular
Ijika lesilinganiso se-nitrogen ne-hydrogen
ngephampu ye-molecular ehlanganisiwe
I-EV Series Installation Dimension Table ye-Compound Molecular Pump
| Imodeli | I-EV-600 | I-EV-1200 | I-EV-1600 | ||||
| I-Inlet Flange (mm) | 150 CF | 160 ISO-K | 200 CF | 200 ISO-K | 250 CF | 250 ISO-K | |
| D1 | Φ202 | Φ180 | Φ253 | Φ240 | Φ305 | Φ290 | |
| D2 | Φ212 | Φ212 | Φ237 | Φ237 | Φ274 | Φ274 | |
| D3 | Φ236 | Φ236 | Φ266 | Φ266 | Φ296 | Φ296 | |
| D4 | ¨145.7 | ¨145.7 | ¨167.6 | ¨167.6 | ¨183.9 | ¨183.9 | |
| H1 | 375 | 375 | 405 | 405 | 393 | 393 | |
| H2 | 235 | 235 | 265 | 265 | 250 | 250 | |
| H3 | 238 | 238 | 265 | 265 | 250 | 250 | |
| H4 | 108 | 108 | 113 | 113 | 110 | 110 | |
| H5 | 4 | 4 | 19 | 19 | 16 | 16 | |
| L1 | 130 | 130 | 145 | 145 | 160 | 160 | |
| L2 | 137 | 137 | 152 | 152 | 176 | 176 | |
| Imbobo yesikulufu somlenze wepompo | 4-M8 | 4-M8 | 4-M8 | 4-M8 | 4-M8 | 4-M8 | |
| I-Outlet Flange(mm) | KF40 | KF40 | KF40 | KF40 | KF50 | KF50 | |
I-EV Series Amaphampu okupholisa umoya we-Molecular
I-EV-series air-cooled air-cooled compound pump ye-molecular pump yenziwe ngepompo ye-turbomolecular kanye ne-disc traction pump.Inezici zesivinini sokumpompa okuphezulu kanye nesilinganiso sokuminyanisa sokugeleza kwamangqamuzana ephampu ye-turbomolecular, isivinini sokumpompa okuphezulu kanye nesilinganiso sokucindezela sokucindezela okuphezulu kwephampu yokudonsa, futhi inwebisa ububanzi bokusetshenziswa kwephampu yamangqamuzana.
Iphampu ye-molecular ehlanganisiwe ayinakho ukukhetha kanye nomthelela wenkumbulo kugesi elimpontshwa.Ngenxa yokucindezelwa kwayo okuphezulu negesi enesisindo esikhulu samangqamuzana, iphampu ingathola i-vacuum ehlanzekile ephezulu nephezulu ngaphandle kwesicupho esibandayo kanye ne-baffle kawoyela.Isetshenziswa kabanzi emikhakheni ehlukahlukene ye-electronics, i-metallurgy, imboni yamakhemikhali, ucwaningo lwesayensi kanye nobuchwepheshe be-vacuum.
| Imodeli | I-EV-600F | I-EV-1200F | I-EV-1600F | |||
| I-Inlet Flange (mm) | 150 CF | 160 ISO-K | 200 CF | 200 ISO-K | 250 CF | 250 ISO-K |
| D1 | Φ202 | Φ180 | Φ253 | Φ240 | Φ305 | Φ290 |
| D2 | Φ236 | Φ236 | Φ266 | Φ266 | Φ274 | Φ274 |
| D3 | ¨145.7 | ¨145.7 | ¨167.6 | ¨167.6 | ¨183.8 | ¨183.8 |
| H1 | 455 | 455 | 472 | 472 | 465 | 465 |
| H2 | 217.5 | 217.5 | 210 | 210 | 214.5 | 214.5 |
| H3 | 151 | 151 | 151 | 151 | 153 | 153 |
| L1 | 130 | 130 | 145 | 145 | 161 | 161 |
| L2 | 137 | 137 | 152 | 152 | 166 | 166 |
| Imbobo yesikulufu somlenze wepompo | 4-M8 | 4-M8 | 4-M8 | 4-M8 | 4-M8 | 4-M8 |





