I-Thermal Gas Mass Flow Controller (MFC)

Incazelo emfushane:

Isilawuli sokugeleza kwegesi eshisayo (i-MFC) asigcini nje ngokuba nomsebenzi wemitha yokugeleza kwenqwaba, kodwa futhi okubaluleke nakakhulu ukuthi singalawula ukugeleza kwegesi ngokuzenzakalelayo okusho ukuthi umsebenzisi angasetha ukugeleza njengesicelo.I-MFC izolungisa ukugeleza kwenani elimisiwe ngokuzenzakalelayo.Inani elimisiwe ngeke lichezuke ngisho noma ingcindezi yesistimu ishintshashintsha noma izinga lokushisa elizungezile lishintsha.Ngamafuphi, isilawuli sokugeleza kwesisindo siyidivayisi ezinzile, iyithuluzi elizinzile lokugeleza kwegesi elingahlelwa ngesandla noma lilawulwe yikhompyutha ngokuzenzakalelayo.

Thumela i-imeyili kithi

Imininingwane Yomkhiqizo

Omaka bomkhiqizo

Irmulwelwemizimbongolofphansimeter(MFM)isakindofaccuratemeasui-remintofgasflow,the measuredvaluyisani-otcontrolledbyfluctuatioisonoithemi-peratureorpressure, don't needthecompensationoftemperatureandpressure.

Imodeli	I-SQC-100
Ububanzi bokugeleza (N2)	0～5,10,20,30,50,100,200,500SCCM
Ububanzi bokugeleza (N2)	0～1, 2, 3, 5, 10, 15, 20, 30SLM
Ukunemba	±1％FS(≤15SLM);±2％FS(＞15SLM)
Uhlobo lwe-Valve Drive	Okujwayelekile Kuvaliwe
Umugqa	±1％FS(≤15SLM);±2％FS(＞15SLM)
Ukuphindaphinda	±0.2％FS
Isikhathi sokuphendula	≤1sec
Okokufaka/okukhiphayo Isiginali	0; 5V
I-Electric Joint	DB15 pin (inaliti)
Operation Tem.	5℃45℃
Umehluko Pre.	0.05～0.5MPa (MFC); 0.03–3.0MPa (MFM)
Isilinganiso sokuvuza	1×10-8SCCS (Yena)
Ubukhulu.Ingcindezi	3MPa
Izinto Ezimaphakathi	316L SS kanye nempahla yokuvala
Impahla Yokuvala	I-Viton, irabha ye-Silicone, i-NBR, i-Teflon, i-Metal seal.
Usayizi Ohlangene	I-VCR 1/4”; i-Swagelok 1/8”, 1/4”; φ3, φ6mm
Ukunikezwa kwamandla kagesi	+15V,50mA;-15V,200mA

Imodeli	I-SQC-200
Ububanzi bokugeleza (N2)	I-MFC: 0-20, 30, 50, 100, 150, 200SLM
Ububanzi bokugeleza (N2)	I-MFM: 0-20, 30, 50, 100, 150, 200, 250, 300SLM
Ukunemba	±2％FS
Uhlobo lwe-Valve Drive	Okujwayelekile Kuvaliwe
Umugqa	±2％FS
Ukuphindaphinda	±0.2％FS
Isikhathi sokuphendula	≤5 amasekhondi
Okokufaka/okukhiphayo Isiginali	1 - 5V; 4 - 20mA
I-Electric Joint	DB15 pin (inaliti)
Operation Tem.	5℃45℃
Umehluko Pre.	0.1–0.3MPa (MFC); 0.05～3.0MPa (MFM)
Isilinganiso sokuvuza	1×10-8SCCS (Yena)
Ubukhulu.Ingcindezi	3MPa
Izinto Ezimaphakathi	316L SS kanye nempahla yokuvala
Impahla Yokuvala	IViton, irabha yeSilicone, NBR, ERP, Teflon
Usayizi Ohlangene	I-Swagelok 3/8”, 1/2”; φ8, φ10, φ12mm
Ukunikezwa kwamandla kagesi	24V,0.5A