6/12 Crystal Rotary Sensor

Short Description:

The rotary probe is designed for critical processes that require long-term closed chamber exhaust. its unique 6/12 body configuration ensures the reliability of long-term complex processes.in applications such as OLED, MBE, solar cell sand long-cycle optical coatings, if the existing body fails or the performance fluctuates, the system will automatically switch to the spare body and complete the positioning calibration to ensure continuous and uninterrupted operation of the process.The pneumatically driven indexing mechanism significantly improves the thermal stability and maintenance efficiency compared to the traditional vacuum heating motor solution. Its matching 8-inch water cooling circulation system not only maintains the overall thermal stability of the probe, but also supports flexible adjustment of the crystal position. When used with a specific film controller, the sensor can provide precise position feedback, allowing users to optimize the body layout plan according to material characteristics to meet diverse process requirements.

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Product Detail

Product Tags

Function Introduction

-6/12 crystals are loaded for reliable automatic switching to maximize process uptime.

-Crystal switching is air driven (competitive products use heat generating motors) so body temperature is very stable

-1/8″ tube maintains thermal stability and provides flexibility in sensor placement

-Optional crystal gate available

Pneumatic 6-Position Crystal Monitor Sensor

The Pneumatic 6-Position Crystal Monitor Sensor is designed and built to provide the highest possible quality and reliability for film thickness monitoring in applications where single or dual crystal sensors cannot last for the entire process. Each sensor contains 6 wafers, maximizing PVD yield and minimizing cost through its low price point – whether in OLED, MBE, solar, long-duration optical coating, or other processes with extended chamber venting intervals.

When used with a film deposition controller, the Pneumatic 6-Position Crystal Monitor automatically rotates a fresh wafer into position whenever the currently used wafer fails or becomes unstable. Wafers are changed automatically without interrupting your process or breaking vacuum, enabling continuous deposition rate monitoring.

Wafer indexing is accomplished via a pneumatic mechanism. This mechanism provides superior wafer thermal stability compared to competitor units that use costly vacuum-rated motors. The 1/8-inch water-cooled tubing not only maintains thermal stability of the sensing head but also allows flexible sensor placement.

When used with certain film deposition controllers, this sensor provides position feedback, allowing specific positions to be assigned to specific materials.

Advantages

Maximize Investment: Achieve the lowest upfront investment while maximizing yield through extended uptime.

Ensure Product Quality: Utilize real-time rate control for continuous or multi-layer film deposition.

Save Time: Simple installation facilitates easy system integration.

Optimize System Performance: Leverage a global network of expert application support.

Industry Compatibility: Compatible with industry-leading controllers.

Stable Wafer Temperature: Wafer changes are pneumatically driven, ensuring thermal stability.

Pneumatic 12-Position Crystal Monitor Sensor

The 12-Position Pneumatic Probe Sensor is essential for long processes requiring continuous rate control. One sensing head contains 12 quartz monitor wafers, ensuring process security whether in OLED, MBE, solar, or other processes with extended chamber venting intervals.

Wafer indexing is accomplished via a pneumatic mechanism. This mechanism provides superior wafer thermal stability compared to competitor units that use costly vacuum-rated motors. The 1/8-inch water-cooling tubing not only maintains thermal stability of the sensing head but also allows flexible sensor placement.

Advantages

Maximizes Process Uptime: Contains 12 wafers with robust automatic switching capability.

Enables Rapid Full Wafer Changeout: Features an easily removable carousel for quick replacement of all 12 wafers.

Ensures Thermal Stability & Placement Flexibility: 1/8-inch tubing aids thermal management and flexible positioning.

Minimizes Maintenance Downtime: An easily removable front deposition shield prevents material buildup on wafers and carousel, reducing the need to remove the entire sensor for servicing.

Crystal Rotary Sensor