Precision Vacuum, Superior Performance

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Semiconductor intelligent cryopump

Short Description:

Cryopump is a device that uses a 10K (-263 ℃) cryocooler as cold source to obtain oil-free high vacuum through the principles of low-temperature condensation and adsorption.

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Product Detail

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Scope of application

-Semiconductor, integrated circuit, display panel (LCD/LED/OLED) manufacturing processes

Semiconductor coating, thin film growth, ion implantation, solar panels, optoelectronic devices

-Vacuum coating

Optical lens coating, protective coatings, glass film-Research and big science projects

Space environment simulation, vacuum exhaust stands, vacuum furnaces, accelerator vacuum systems, material analysis instruments

CTP series cryopump
Performance parameters

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