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Excellent quality Stainless Steel Flexible Bellows - EV series turbo molecular pump – Super Q

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Excellent quality Stainless Steel Flexible Bellows - EV series turbo molecular pump – Super Q Detail:

Profile dimensions and mounting connections of turbo-molecular pumps

EV series turbo molecular pump01
EV series turbo molecular pump01

The Velocity Curve of Turbo molecular pump
pumping nitrogen and hydrogen

EV series turbo molecular pump02

The Velocity Curve of Turbo molecular
pump to the atmosphere

EV-3600 Technical Data

Inlet Flange (mm)

400 ISO – K

Outlet Flange (mm)

100 ISO – K

Pumping Rate(L/S)

3600

Compression Ratio

N2

>108

H2

>5X102

Ultimate Pressure(Pa)

<2X10-6

Rated Speed(rpm)

13500

Vibration

≤0.15 μm

Starting Time(min)

<11

Stop Time(min)

<20

Suggested rotary pump

30-70 L/S

Cooling Method

Water-cooling

Temperature of Water Cooling(℃)

≤25

The flow of water cooling(L/min)

2

Pump Body Baking Temperature

<120℃

Installation Mode

Vertical ±5°

Weight(kg)

≈100

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 EV series turbo molecular pump – Super Q detail pictures


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Excellent quality Stainless Steel Flexible Bellows - EV series turbo molecular pump – Super Q , The product will supply to all over the world, such as: , , ,

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