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factory customized Cf Nipple - EV series turbo molecular pump – Super Q

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factory customized Cf Nipple - EV series turbo molecular pump – Super Q Detail:

Profile dimensions and mounting connections of turbo-molecular pumps

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EV series turbo molecular pump01

The Velocity Curve of Turbo molecular pump
pumping nitrogen and hydrogen

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The Velocity Curve of Turbo molecular
pump to the atmosphere

EV-3600 Technical Data

Inlet Flange (mm)

400 ISO – K

Outlet Flange (mm)

100 ISO – K

Pumping Rate(L/S)

3600

Compression Ratio

N2

>108

H2

>5X102

Ultimate Pressure(Pa)

<2X10-6

Rated Speed(rpm)

13500

Vibration

≤0.15 μm

Starting Time(min)

<11

Stop Time(min)

<20

Suggested rotary pump

30-70 L/S

Cooling Method

Water-cooling

Temperature of Water Cooling(℃)

≤25

The flow of water cooling(L/min)

2

Pump Body Baking Temperature

<120℃

Installation Mode

Vertical ±5°

Weight(kg)

≈100

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factory customized Cf Nipple -
 EV series turbo molecular pump – Super Q detail pictures


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