Front-mounted Single Sensor
Single Crystal Sensor
Function Introduction
-Front-mount crystal holder
-Easy to install
-Includes 2.54 cm(1 in) bolt feedthrough/CF40 feedthrough
-Adjustable length when equipped with compression fittings
-Sensor/feedthrough combination welded to customer specified length
-No brazing required when equipped with compression fittings or welded to feedthrough
The single crystal sensor offers proven reliability and durability. Its thermal stability surpasses anything else available on the market. The front-loading design allows for easy insertion of the wafer holder in applications where there isn’t sufficient space for side insertion. All parts are mechanically assembled, not welded, enabling convenient on-site replacement when necessary. Sensors can be ordered individually or as a sensor/vacuum feedthrough combination, either welded or assembled using compression fittings.
Product Advantages
Front-loading wafer holder
Simple installation
Suitable for:
2.54 cm (1 inch) bolt-style vacuum feedthroughs
Adjustable length when ordered with a compression fitting
Sensor/vacuum feedthrough combinations can be welded to customer-specified lengths
No brazing required when ordered with a compression fitting or welded to the vacuum feedthrough
Sensor Configuration
Two sensor configurations are available: Standard and Right-Angle (Compact).
The Standard configuration is designed for mounting from the side or bottom of a vacuum chamber, with cooling tubes parallel to the wafer face.
The Right-Angle configuration is designed for mounting through the top of a vacuum system, with water-cooling tubes perpendicular to the wafer face.
The drop-down baffle design facilitates easy wafer changes.
The exposed wafer electrode is fully grounded, effectively eliminating problems caused by RF noise.
Vacuum Feedthrough Connection
Single sensors can be ordered combined with a vacuum feedthrough. The sensor/vacuum feedthrough connection can be achieved either by welding or via a compression fitting. Compression fittings allow for easy adjustment without welding. The vacuum feedthrough can be moved along the tube length, making the “E” length sensor’s internal length within the vacuum system adjustable between 20.3 cm and 71.1 cm (8 to 28 inches). Once the desired length is set, the compression fitting provides a finger-tight tube seal. Alternatively, a welded connection can be selected.
Vacuum Feedthrough
We currently offer one vacuum feedthrough: 1-inch (2.54 cm) Bolt-Style Vacuum Feedthrough.
