OEM Supply Grease Lubrication Turbo Pump - Thermal gas Mass Flow Controller (MFC) – Super Q
OEM Supply Grease Lubrication Turbo Pump - Thermal gas Mass Flow Controller (MFC) – Super Q Detail:
Thermalgasmassflowmeter(MFM)isakindofaccuratemeasurementofgasflow,the measuredvaluesarenotcontrolledbyfluctuationsintemperatureorpressure,donot needthecompensationoftemperatureandpressure.
| Model | SQC-100 |
| Ranges of Flow (N2) | 0～5，10，20，30 ，50 ，100 ，200，500SCCM |
| 0～1, 2, 3, 5, 10, 15, 20, 30SLM | |
| Accuracy | ±1％F.S.(≤15SLM)；±2％F.S.(＞15SLM) |
| Valve Drive Type | Normal Closed |
| Linearity | ±1％F.S.(≤15SLM)；±2％F.S.(＞15SLM) |
| Repeatability | ±0.2％F.S. |
| Response Time | ≤1sec |
| Input/output Signal | 0～5V |
| Electric Joint | DB15 pin (needle) |
| Operation Tem. | 5～45℃ |
| Differential Pre. | 0.05～0.5MPa （MFC）； 0.03～3.0MPa （MFM） |
| Leak Rate | 1×10-8SCCS （He） |
| Max. Pressure | 3MPa |
| Medium Material | 316L SS and sealing material |
| Sealing Material | Viton, Silicone rubber, NBR, Teflon, Metal seal. |
| Joint Size | VCR 1/4”；Swagelok 1/8” 、1/4”；φ3、 φ6mm |
| Power Supply | +15V,50mA；-15V,200mA |
| Model | SQC-200 |
| Ranges of Flow (N2) | MFC：0～20，30 ，50 ，100 ，150， 200SLM |
| MFM：0～20 ，30 ，50，100 ，150， 200 ，250，300SLM | |
| Accuracy | ±2％F.S. |
| Valve Drive Type | Normal Closed |
| Linearity | ±2％F.S. |
| Repeatability | ±0.2％F.S. |
| Response Time | ≤5sec |
| Input/output Signal | 1～5V；4～20mA |
| Electric Joint | DB15 pin (needle) |
| Operation Tem. | 5～45℃ |
| Differential Pre. | 0.1～0.3MPa（MFC）； 0.05～3.0MPa （MFM） |
| Leak Rate | 1×10-8SCCS （He） |
| Max. Pressure | 3MPa |
| Medium Material | 316L SS and sealing material |
| Sealing Material | Viton, Silicone rubber, NBR, ERP, Teflon |
| Joint Size | Swagelok 3/8” 、1/2”； φ8、φ10、φ12mm |
| Power Supply | 24V,0.5A |
Product detail pictures:
Related Product Guide:
OEM Supply Grease Lubrication Turbo Pump - Thermal gas Mass Flow Controller (MFC) – Super Q , The product will supply to all over the world, such as: , , ,
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