Polycrystalline (6/12)Rotary Sensor

Short Description:

The rotating sensor head is designed for harsh working conditions and is made of ultra-thick film composite structure and selected high-performance materials The core 6/12 sensor crystals are installed in a heat shielded and water-cooled double-protected housing through precision fixing, and integrated with a dual.circulation cooling system to ensure the stable output performance of the crystal array in a high temperature environment of 300′C. The sensor head also adopts a unique design combining a quick-release flange interface with a stainless steel crystal bracket village, which ensures thermodynamic stability while achieving rapid maintenance function.

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Product Detail

Product Tags

Function Introduction

- 6/12 crystals

-Rugged design

- Position feedback (depending on controller)

-Adjustable length (with optional flange)

Product Advantages

Maximize Output & Film Precision: Achieved through the highest quality design and manufacturing capabilities.

Increase Throughput: Maximized uptime with simple and fast wafer changes.

Save Time: Simple on-site maintenance and installation.

Each sensor contains 6 wafers. The sensor design is robust and durable, maximizing PVD precision and yield.

Maximize Film Quality: Long-life design, high-quality manufacturing, and effective wafer cooling maximize precision. The KN-G6 packages 6 wafers within a water-cooled, thermally isolated housing, ensuring excellent performance even in environments up to 300°C.

Maximize Yield: Simple on-site maintenance maximizes uptime. Wafers are mounted in an easily removable stainless steel wafer holder. Wafer position is incremented pneumatically by applying a 1-second pulse to a 115 VAC or 24 VDC solenoid valve. A 7-pin connector provides individual switch-to-ground closures to indicate the currently selected wafer position.

Sensor Configuration

The KN-G6 in a flat-tip configuration can be top-mounted using an O-ring sealed feedthrough (not included).

The 45-degree pointed-tip configuration allows side-mounting into a chamber.

The standard sensing head cover is stainless steel. A copper sensing head cover is available for temperature-critical applications.

The KN-G6 is offered in the following lengths for inside the vacuum system:

- 200 mm (7.9 in)

- 350 mm (13.8 in)

- 450 mm (17.7 in)

- 540 mm (21.3 in)

- 650 mm (25.6 in)