Semiconductor peripheral accessories
The film thickness controller is the ‘eyes’ and ‘intelligent controller’ of modern thin-film deposition technology. Through real-time monitoring and closed-loop feedback, it ensures that the thin-film deposition process can accurately, stably, and repeatably produce film products meeting design specifications in numerous advanced technological and industrial fields such as semiconductors, optics, displays, photovoltaics, tools, and decorative coatings. It is a key piece of equipment for enhancing product performance, guaranteeing yield rates, and reducing costs.
- Suitable for optical coating.
- Capable of long-duration, uninterrupted evaporation.
- Measures implemented to suppress abnormal discharge.
- Excellent maintenance performance.
- Excellent deposition reproducibility.
AT Crystal Specifica-tions:
Operating Temperature：20°C to 100°C
Electrode Material Options：Gold, Alloy, Silver Plating
Inficon Type：6MHz, 14mm
Coating：Balzer Type：5MHz, 14mm; Ulvac Type：5MHz, 12.5mm
RC Crystal Specifica-tions:
Operating Temperature: 20°C to 250°C
Reduces or eliminates the impact of thermal radiation from evaporation sources on
deposition rate “spikes”, suitable for high-temperature coating and nano-multilayer
applications such as optics, OLEDs, ALD, CIGS, CVD, MBE, etc.
