Ultra-High Vacuum Motor Driven Gate Valve

Features:

1. Two sealing options: bellow sealing and viton sealing.

2. The valve body is welded inside stainless steel with low leakage rate

3. The valve body adopts a rib structure, small size, light weight and excellent appearance.

4. Adopt double-guide-rail structure, smooth movement, monolithic construction inside the valve and well-distributed holding power.

Product Detail

EVCCD Series Technical Specifications Of Ultra High Vacuum Electric Gate Valve

Model		EVCCD-100B	EVCCD-160B	EVCCD-200B	EVCCD-250B
Pressure range	Pa	1.3×10^-7～1.2×10⁵
Inside nominal diameter	mm	100	150	200	250
Leak rate	Pa·L/s	1.3×10^-7
Different pressure in opening direction	Pa	3000(arbitrary)
Connection flange	—	CF、ISO-K、GB-LP、ISO-F
Service life until first maintenance	times	10000
Heating temperature (Valve body)	℃	Closed≤120，opend≤150
Supply voltage	V	220±10%
Opening / closing time	s	≤50s
Position indicator of the valve	—	The micro switch
Installation orientation	—	any
Ambient temperature	℃	5~40

Technical Parameters:

Application scope	1x10^(-5)Pa~1.2x10^(5)Pa(Viton o-ring sealed)1x10^(-6)Pa~1.2x10^(5)Pa(Bellow seal)
Differential pressure on the gate	≤3x10^(3)Pa any directions
Body and seat leakrate	1.3x10^(-7)Pa.L.S^(-1)
Cycles until first service	100,000 times
Bake-out temperature	open≤250℃; close≤150℃
Installation position	Any directions
Compressed air (only supply to pneumatic valves)	DN63~200: 0.4-0.7MPa;DN250~400: 0.5~0.7MPa
Power Supply	Pneumatic valves: AC 220V 50HZ, 6W or DC 24V, 3W( can be customized)DN63~250 for AC 220V 50HZ, 25WOr AC 380V 50HZ, 25WDN320~400 is AC 220V 50HZ, 40W Or AC 380V 50HZ, 40W
Speed of opening or closing:	Pneumatic drive:DN63~DN250≤6s; DN320~DN400≤10sElectric drive:DN63~DN250≤50s; DN320~DN400≤60s
Valve position indication:	Manual drive: with start & stop position indicator switch (mechanical)Pneumatic drive: with start & stop position indicator switch (magnetic switch)Electric drive: with start & stop position indicator switch (micro switch)