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Vacuum Solenoid Valves - Ultra-high Vacuum Pneumatic Gate Valve, CF Flange – Super Q

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Vacuum Solenoid Valves - Ultra-high Vacuum Pneumatic Gate Valve, CF Flange – Super Q Detail:

EVCCQ SeriesUltra-high Vacuum Pneumatic Gate Valve

EVCCQ Series ultra-high vacuum plug-in valve is driven by cylinder rod up and down to open or close the valve plate.

Valves are suitable for cutting off or connecting air flow in ultra-high vacuum system. It has the advantages of reasonable structure design, stable operation, small size, reliable use, good sealing performance and long service life.

The suitable working medium is clean air and non-corrosive gas.

Technical Parameters of EVCCQ SeriesUltra-high Vacuum Pneumatic Gate Valve

Model EVCCQ-63B(CF) EVCCQ-80B(CF) EVCCQ-100B(CF) EVCCQ-160B(CF) EVCCQ-200B(CF) EVCCQ-250B(CF)
Pressure range Pa 1.3×10-7~1.2×105
Inside nominal diameter mm 63 80 100 150 200 250
Leak rate Pa·L/s 1.3×10-7
Differentpressure in opening direction Pa 3000(arbitrary)
Connection flange CF、ISO-K、GB-LP、ISO-F
Service life until first maintenance times 10000
Heating temperature(Valve body) Closed≤120, opend≤150
Supply voltage V 220±10 %(Other specifications can be customized )
Opening / closing time s ≤ 6
Compressed air MPa 0.4~0.7 0.5~0.7
Positionindicator of the valve Magnetic switch
Installation orientation any
Ambient temperature 5~40
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Product detail pictures:

Vacuum Solenoid Valves -
 Ultra-high Vacuum Pneumatic Gate Valve, CF Flange – Super Q detail pictures

Vacuum Solenoid Valves -
 Ultra-high Vacuum Pneumatic Gate Valve, CF Flange – Super Q detail pictures

Vacuum Solenoid Valves -
 Ultra-high Vacuum Pneumatic Gate Valve, CF Flange – Super Q detail pictures


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