Front-mounted Dual Sensor

Short Description:

Front-mounted dual crystal probes excel in thermal stability with their proven reliability and durability. This design is particularly suitable for critical process scenarios such as vacuum chambers, and the dual body configuration provides backup functions to ensure process continuity and reliability.

The front-mounted structure design can easily adapt to compact equipment layouts without additional lateral space. Mechanical assembly replaces welding process, which not only ensures stable performance, but also facilitates on-site maintenance and component replacement. Sensors can be purchased separately or provided in the form of probes and feedthroughs (optional permanent high-precision welding or quick-plug compression fitting connection) to meet diverse engineering needs.

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Product Detail

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The front-mounted dual crystal sensor not only features proven reliability and durability, but also outperforms any other sensor head on the market in thermal stability. The dual crystal configuration provides a backup wafer, which is essential for critical processes in vacuum chambers where a secondary wafer is highly recommended.

The front-mounted design enables easy insertion of the wafer holder in applications with insufficient lateral clearance for side insertion. All components are mechanically assembled (as opposed to being welded), allowing convenient on-site replacement when necessary. Sensors can be ordered individually or as sensor/feedthrough combinations, available in either welded or compression-fitting configurations.

Sensor Configuration
The front-mounted dual crystal sensor comes standard with a configuration where water pipes run parallel to the crystal plane. A pneumatic wafer baffle is included to protect the backup wafer while the primary wafer monitors deposition rates. Featuring a pull-down design, the baffle allows easy wafer replacement.

The exposed wafer electrodes are fully grounded, effectively eliminating issues caused by RF interference.

Front-mounted Dual Sensor