Thermalgasmassflowmeter(MFM)isakindofaccuratemeasurementofgasflow,the measuredvaluesarenotcontrolledbyfluctuationsintemperatureorpressure,donot needthecompensationoftemperatureandpressure.
| Model |
SQC-100 |
| Ranges of Flow (N2) |
0~5,10,20,30 ,50 ,100 ,200,500SCCM |
| 0~1, 2, 3, 5, 10, 15, 20, 30SLM |
| Accuracy |
±1%F.S.(≤15SLM);±2%F.S.(>15SLM) |
| Valve Drive Type |
Normal Closed |
| Linearity |
±1%F.S.(≤15SLM);±2%F.S.(>15SLM) |
| Repeatability |
±0.2%F.S. |
| Response Time |
≤1sec |
| Input/output Signal |
0~5V |
| Electric Joint |
DB15 pin (needle) |
| Operation Tem. |
5~45℃ |
| Differential Pre. |
0.05~0.5MPa (MFC); 0.03~3.0MPa (MFM) |
| Leak Rate |
1×10-8SCCS (He) |
| Max. Pressure |
3MPa |
| Medium Material |
316L SS and sealing material |
| Sealing Material |
Viton, Silicone rubber, NBR, Teflon, Metal seal. |
| Joint Size |
VCR 1/4”;Swagelok 1/8” 、1/4”;φ3、 φ6mm |
| Power Supply |
+15V,50mA;-15V,200mA |
| Model |
SQC-200 |
| Ranges of Flow (N2) |
MFC:0~20,30 ,50 ,100 ,150, 200SLM |
| MFM:0~20 ,30 ,50,100 ,150, 200 ,250,300SLM |
| Accuracy |
±2%F.S. |
| Valve Drive Type |
Normal Closed |
| Linearity |
±2%F.S. |
| Repeatability |
±0.2%F.S. |
| Response Time |
≤5sec |
| Input/output Signal |
1~5V;4~20mA |
| Electric Joint |
DB15 pin (needle) |
| Operation Tem. |
5~45℃ |
| Differential Pre. |
0.1~0.3MPa(MFC); 0.05~3.0MPa (MFM) |
| Leak Rate |
1×10-8SCCS (He) |
| Max. Pressure |
3MPa |
| Medium Material |
316L SS and sealing material |
| Sealing Material |
Viton, Silicone rubber, NBR, ERP, Teflon |
| Joint Size |
Swagelok 3/8” 、1/2”; φ8、φ10、φ12mm |
| Power Supply |
24V,0.5A |